SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: SEMI HQ, Milpitas CA
Date of Meeting: 04/05/2017
Meeting End Date: 04/05/2017
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 04/18/2017


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
DDA TFBrian Rubow (Cimetrix)Brian Rubow (Cimetrix)
Albert Fuchigami (PEER Group) - new TF Leader


Committee Structure Changes
None

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6026ALine Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS)Passed6026A_Procedural Review.pdf6026A_Procedural Review.pdf
6066ALine Item Revision to SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
Line-item 1Passed6066A_Procedural Review.pdf6066A_Procedural Review.pdf
Line-item 2Passed
6068ALine Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1 Specification for SECS-II Protocol for Equipment Performance Tracking
Line-item 1Passed 6068A_Procedural Review.pdf6068A_Procedural Review.pdf
Line-item 2Passed
5872BLine Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD)Failed
5549ARevision to SEMI E30-0416, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)Passed 5549A_Procedural Review.pdf5549A_Procedural Review.pdf
5738Revision to SEMI E87.1-0707, Specification for SECS-II Protocol for Carrier Management (CMS)Passed 5738_Procedural Review.pdf5738_Procedural Review.pdf
6064ALine Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing ApplicationsPassed 6064A_Procedural Review.pdf6064A_Procedural Review.pdf
6067AReapproval of SEMI E54.10-0600 (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor DevicePassed 6067A_Procedural Review.pdf6067A_Procedural Review.pdf
6116Reapproval of SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINKFailed
(transfer ownership to Japan I&C TC)
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
6124SNARFGUI TFRevision to SEMI E95 -1101, Specification for Human Interface for Semiconductor Manufacturing Equipment.


Authorized Activities

#
SC/TF/WG
Details
6116SBReapproval of SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK
Transfer ownership of the document to Japan TC
TBDSBLine Item revision to SEMI E54.9, Specification for Sensor/Actuator Network Communication for Modbus/TCP over TCP/IP
SNARF approved by TC Chapter


Authorized Ballots

#
When
TF
Details
5716Cycle 5-17PCSRevisions to SEMI E133-1104-0710R, Specification for Automated Process Control Systems Interface and SEMI E133.1-1104-0710R, Provisional Specification for XML Messaging for Process Control Systems (PSC)
TBDCycle 5-17SBLine Item revision to SEMI E54.9, Specification for Sensor/Actuator Network Communication for Modbus/TCP over TCP/IP
5872CCycle 5-17GEM300Line Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD)
6114Cycle 5-17GEM300Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)
TBDCycle 5-17 I&C TCReapproval of SEMI E82-1106 (Reapproved 0612), Specification for Interbay/Intrabay AMHS SEM (IBSEM)
TBDCycle 5-17I&C TCReapproval of SEMI E88-0307 (Reapproved 0612), Specification for AMHS Storage SEM (Stocker SEM)
TBDCycle 5-17I&C TCLine Item Revision to SEMI E4-0699 (Reapproved 0612), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) to correct nonconforming title to: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status

Standard Designation
Title
SEMI E54.16-1106Specification for Sensor/Actuator Network Communications for Lonworks
Transfer ownership of the document to Japan TC


Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

Monday, July 10, 2017, San Francisco, CA

    · NA I&C Leadership (12:00 Noon – 1:00 PM)
    · DDA (1:00 PM – 3:00 PM)
    · PCS (3:00 PM – 5:00 PM)
    · I&C GCS (5:00 PM – 5:30 PM)
Tuesday, July 11, 2017, San Francisco, CA
    · I&C GUI TF (9:00AM –12:00 noon)
    · Energy Saving Equipment Communication (9:00 AM – 12:00 noon)
    · GEM300 (1:00 PM – 4:00 PM)
    · Sensor Bus (4PM – 6:00 PM)
Wednesday, July 12, San Francisco, CA
    · I&C Committee (8:00 AM – 2:00 PM)