SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: San Francisco, CA
Date of Meeting: 07/11/2017
Meeting End Date: 07/11/2017
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 08/01/2017


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
High Purity Liquid Assemblies and Systems TFDavid Kandiyeli (Mega Fluid Systems) - new
Chemical Analytical Methods TFDavid Kandiyeli (Mega Fluid Systems) - new


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5831BRevision to SEMI C27-0708, Specifications and Guideline for Hydrochloric Acid with title change to: Specification and Guide for Hydrochloric AcidPassed5831B_Procedural Review.pdf5831B_Procedural Review.pdf
5642ARevision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric AcidPassed5642A_Procedural Review.pdf5642A_Procedural Review.pdf
6173Line Item Revision to SEMI C30-1110, Specifications for Hydrogen Peroxide ,to correct nonconforming title to: Specification for Hydrogen Peroxide Passed6173 Procedural Review.pdf6173 Procedural Review.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
6195SNARFHPPM&C TFRevision to SEMI F104-0312 Particle Test Method for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems, with title change to correct nonconforming title.
Approved by GCS 05/09/2017


Authorized Activities

#
Type
SC/TF/WG
Details
TBDSNARFPrecursor Specifications TF
(EU Chapter)		Reapproval of SEMI C81-0113, Guide for Tris(Dimethylamino) Silane (3DMAS)
TBDSNARFCAMReapproval of SEMI C62-0309, Specification for Porogen Precursors Used in Low K CVD Processes
TBDSNARFCAMReapproval of SEMI C63-1108, Specification for Organosilicate Precursors Used in Low K CVD Processes
TBDSNARFCAMLine-item Revision to SEMI C45-0309E, Specification and Guideline for Tetraethylorthosilicate (TEOS), to correct nonconforming title
TBDSNARFCAMLine-item Revision to SEMI C29-1110, Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) to correct nonconforming title
TBDSNARFCAMReapproval of SEMI C40-1110, Specification for Potassium Hydroxide, 45% Solution
TBDSNARFCAMReapproval of SEMI C1-0310, Guide for the Analysis of Liquid Chemicals
TBDSNARFCAMReinstatement of SEMI F34-0998, Guide for Liquid Chemical Pipe Labeling
<to distribute to GCS for approval or not? I recall since no changes, no need to distribute>
5942SNARFHPLASRevision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in
Semiconductor Manufacturing Equipment, with title change to, Guide for Ultrahigh Purity Solvent Distribution Systems with Metallic Fluid Paths in Semiconductor Manufacturing Equipment
SNARF revised to add the title change
5978SNARFHPLASRevision to SEMI E49.5-1104, Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment, with title change to, Guide for the Design of Ultrahigh Purity Solvent Distribution Systems with Non-Metallic Fluid Paths in Semiconductor Manufacturing Equipment
SNARF revised to add the title change
TBDSNARFHPLASRevision to SEMI E49.7-0304, Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment, with title change
New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 6/7-17
TBDSNARFCAMRevision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol including title change to Specification and Guide for 2-Propanol
New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 7-17
TBDSNARFCAMRevision to SEMI C28-0611, Specifications for Hydrofluoric Acid, with title change to correct nonconforming title
New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 7-17
TBDSNARFCAMRevision to SEMI C21-0708, Specifications and Guidelines for Ammonium Hydroxide, including title change to Specification and Guide for Ammonium Hydroxide
New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 7-17
TBDSNARFCAMRevision to SEMI C44-0514, Specification and Guide for Sulfuric Acid
New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 7-17
TBDSNARFCAMRevision to SEMI C30-MMYY, Specification and Guide for Hydrogen Peroxide
New SNARF, for 2 weeks review and GCS approval.
Ballot after SEMI publishes most recently adjudicated version of the document. Target new ballot in Cycle TBD-17.
TBDSNARFCAMRevision to SEMI C27-MMYY, Specification and Guide for Hydrochloric Acid
New SNARF, for 2 weeks review and GCS approval.
Ballot after SEMI publishes most recently adjudicated version of the document. Target new ballot in Cycle TBD-17


Authorized Ballots

#
When
TF
Details
TBDCycle 6/7-17Precursor Specifications TF
(Europe Chapter)		Reapproval of SEMI C81-0113, Guide for Tris(Dimethylamino) Silane (3DMAS)
TBDCycle 6/7-17CAMReapproval of SEMI C62-0309, Specification for Porogen Precursors Used in Low K CVD Processes
TBDCycle 6/7-17CAMReapproval of SEMI C63-1108, Specification for Organosilicate Precursors Used in Low K CVD Processes
TBDCycle 6/7-17CAMLine-item Revision to SEMI C45-0309E, Specification and Guideline for Tetraethylorthosilicate (TEOS), to correct nonconforming title
TBDCycle 6/7-17CAMLine-item Revision to SEMI C29-1110, Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) to correct nonconforming title
TBDCycle 6/7-17CAMReapproval of SEMI C40-1110, Specification for Potassium Hydroxide, 45% Solution
TBDCycle 6/7-17CAMReapproval of SEMI C1-0310, Guide for the Analysis of Liquid Chemicals
TBDCycle 6/7-17CAMReinstatement of SEMI F34-0998, Guide for Liquid Chemical Pipe Labeling
<to distribute to GCS for approval or not? I recall since no changes, no need to distribute>
5942Cycle 6/7-17HPLASRevision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in
Semiconductor Manufacturing Equipment, with title change to, Guide for Ultrahigh Purity Solvent Distribution Systems with Metallic Fluid Paths in Semiconductor Manufacturing Equipment
SNARF revised to add the title change
5978Cycle 6/7-17HPLASRevision to SEMI E49.5-1104, Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment, with title change to, Guide for the Design of Ultrahigh Purity Solvent Distribution Systems with Non-Metallic Fluid Paths in Semiconductor Manufacturing Equipment
SNARF revised to add the title change
6136Cycle 7-17UPWRevision to SEMI F98-0305 (Reapproved 1111), Guide for Treatment of Reuse Water in Semiconductor Processing



SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
5809CAMLine item revision to SEMI C69-0611, Test Method for the Determination of Surface Areas of Polymer Pellets10/07/2018


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
Information on other upcoming meetings, programs, workshops, STEPs, and other events.
    · 2nd Annual SECC Workshop – Wed. July 12 (8:30AM – Noon)
    · For additional information contact: Slava Libman at: slibman@ftdsolutions.net

Next Meeting
Monday, November 6 2017; SEMI HQ, Milpitas, CA

· High Purity Polymer Materials & Components (8AM – 9:30AM)
· UPW Task Force (9:30AM – 11AM)
· High Purity Liquid Assemblies and Systems TF (1PM - 3PM)

    Tuesday, November 7 2017; SEMI HQ, Milpitas, CA

    · Chemical Analytical Methods TF (8AM – 11AM)
    · Liquid Chemicals TC Chapter (2PM - 5PM)


    For more information, please visit Standards Calendar at http://www.semi.org/en/standards