SEMI International Standards
Standards Locale: North America |
Committee: EHS |
Place of Meeting: SEMI HQ, Milpitas, CA |
Date of Meeting: 04/12/2018 |
Meeting End Date: 04/12/2018 |
|
Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: 04/19/2018 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
MESSC | Andrew Giles (ESTEC) | Kalysha Rivera(TEL) |
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
None | S2 Korean High Pressure Gas Safety TF (new TFOF) |
Ballot Results
Document # | Document Title | Committee Action |
5761C | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Failed and returned to TF for reballot |
6310 | Reapproval of SEMI S28-1011 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment | Failed, SNARF abolished |
R6204 | Ratification Ballot, Line Item Revisions to SEMI S6-0707E With Title Change To: Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | |
Line Item 3 - Update retroactive clause to refer to more versions than S6-93 and align with S2 revision | Passed, A&R Cycle 1-2018 |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
6354 | SNARF | S2 Korean High Pressure Gas Safety TF | Line Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
6366 | SNARF | Anchorage TF | Line Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
6372 | SNARF | Seismic TF | Line Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
Authorized Ballots
# | When | SC/TF/WG | Details |
6366 | Cycle 4 or 5 -18 | Anchorage TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
6372 | Cycle 4 or 5 -18 | Seismic TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
6354 | Cycle 4 or 5 -18 | S2 Korean High Pressure Gas Safety Task Force | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
· Addition of related information
|
6049A | Cycle 4 or 5 -18 | S10 Revision TF | Line Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process |
5761D | Cycle 4 or 5 -18 | Energetic Materials TF | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes |
5957 | Cycle 4 or 5 -18 | Control of Hazardous Energy TF | Line Item Revision of S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
6171 | Cycle 4 or 5 -18 | S2 Chemical Exposure Task Force | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Standard Designation | Title |
SEMI S28-1011 | Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment |
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
July 12, 2018 9:00 am - 6:00 pm San Francisco Marriott Marquis, San Francisco, California in conjunction with SEMICON West. Please refer to www.semi.org/standards, under calendar of event for additional information.
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.
|