SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: SEMI HQ, Milpitas, CA
Date of Meeting: 04/12/2018
Meeting End Date: 04/12/2018
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 04/19/2018


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
MESSC Andrew Giles (ESTEC)Kalysha Rivera(TEL)


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
NoneS2 Korean High Pressure Gas Safety TF (new TFOF)


Ballot Results

Document #
Document Title
Committee Action
5761CNew Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing ProcessesFailed and returned to TF for reballot
6310Reapproval of SEMI S28-1011 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing EquipmentFailed, SNARF abolished
R6204Ratification Ballot, Line Item Revisions to SEMI S6-0707E With Title Change To: Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
Line Item 3 - Update retroactive clause to refer to more versions than S6-93 and align with S2 revisionPassed, A&R Cycle 1-2018


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6354SNARFS2 Korean High Pressure Gas Safety TFLine Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
6366SNARFAnchorage TFLine Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
6372SNARFSeismic TFLine Item Revision to SEMI S2-1016b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment


Authorized Ballots

#
When
SC/TF/WG
Details
6366Cycle 4 or 5 -18Anchorage TFLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
6372Cycle 4 or 5 -18Seismic TFLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
6354Cycle 4 or 5 -18S2 Korean High Pressure Gas Safety Task ForceLine Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
      · Addition of related information
6049ACycle 4 or 5 -18S10 Revision TFLine Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process
5761DCycle 4 or 5 -18Energetic Materials TFNew Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
5957Cycle 4 or 5 -18Control of Hazardous Energy TFLine Item Revision of S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
6171Cycle 4 or 5 -18S2 Chemical Exposure Task ForceLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status

Standard Designation
Title
SEMI S28-1011Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment


Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
July 12, 2018 9:00 am - 6:00 pm San Francisco Marriott Marquis, San Francisco, California in conjunction with SEMICON West. Please refer to www.semi.org/standards, under calendar of event for additional information.