SEMI International Standards
Standards Locale: Japan
Committee: Liquid Chemicals
Place of Meeting: SEMICON Japan 2017, Tokyo Big Sight, Tokyo, Japan
Date of Meeting: 12/13/2017
Meeting End Date: 12/13/2017
Recording SEMI Standards Staff: Mizue Iwamura
CER Posted to Web: 12/25/2017


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
#6196Reapproval of SEMI C77-0912, Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nmPassed as balloted6196_BallotReport.pdf6196_BallotReport.pdf
#6197Reapproval of SEMI F110-0712, Test Method for Mono-Dispersed Polystyrene Latex (PSL) Challenge of Liquid FiltersPassed, as balloted6197_BallotReport.pdf6197_BallotReport.pdf


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
TBDSNARFLiquid-borne Particle Counter Task ForceLine Item Revision of SEMI C77-0912, Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
Authorized Ballots

#
When
TF
Details
TBDCycle 2, 2108Liquid-borne Particle Counter Task ForceLine Item Revision of SEMI C77-0912, Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
April 23, 2018 Begin 15:00 – End 17:00
SEMI Japan, Tokyo, Japan