SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: SEMI HQ, Milpitas CA
Date of Meeting: 04/05/2017
Meeting End Date: 04/05/2017
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 04/12/2017


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
RF Measurements TF (new)NoneJay Osselburn (QEI)
Ya-hong Neirynck (Intel)


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Changes
noneRF Measurements TF (new)


Ballot Results


Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5596New Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing EnvironmentFailed
6115Reapproval for E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated AreasPassed6115_Procedural Review.pdf6115_Procedural Review.pdf
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
6144SNARFE-COOLine-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
6145SNARFE-COOLine-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
6146SNARFE-COOLine-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems


Authorized Activities

#
SC/TF/WG
Details
TFOF RF Measurements (new)
SNARF6146Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
SNARF revised and approved by TC Chapter
SNARFTBDRevision to SEMI E135, Test Method for RF Generators to Determine Transient Response
New SNARF to be issued for two-week global Metrics TC Member review and GCS approval
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF


Authorized Ballots

#
When
TF
Details
5596ACycle 4/5-17EMC TFNew Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
6144Cycle 4/5-17E-COOLine-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
6145Cycle 4/5-17E-COOLine-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
6146Cycle 4/5-17E-COOLine-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems


SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
5596 EMCNew Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment04/29/2018


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
SEMICON West Standards Meetings, San Francisco, CA

Tuesday, July 11 (Tentative)

        · ESD/ESC TF (13:30 – 15:30)

        · Equipment COO TF – (15:30 – 17:00)

        · EMC TF (17:00 – 18:00)

Wednesday, July 12 (Tentative)
        · Equipment RAMP Metrics TF (9:00 – 11:00)

        · RF Measurements TF (13:00-14:00)

        · Metrics NA TC Chapter (14:00 – 17:00)

Check http://www.semi.org/en/standards-events for details.