SEMI International Standards
Standards Locale: North America |
Committee: Metrics |
Place of Meeting: SEMI HQ, Milpitas CA |
Date of Meeting: 04/05/2017 |
Meeting End Date: 04/05/2017 |
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Recording SEMI Standards Staff: Inna Skvortsova |
CER Posted to Web: 04/12/2017 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
RF Measurements TF (new) | None | Jay Osselburn (QEI)
Ya-hong Neirynck (Intel) |
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Changes |
none | RF Measurements TF (new) |
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5596 | New Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | Failed | |
6115 | Reapproval for E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated Areas | Passed | 6115_Procedural Review.pdf |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
6144 | SNARF | E-COO | Line-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
6145 | SNARF | E-COO | Line-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment |
6146 | SNARF | E-COO | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
Authorized Activities
# | SC/TF/WG | Details |
| TFOF | RF Measurements (new) |
SNARF | 6146 | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
SNARF revised and approved by TC Chapter |
SNARF | TBD | Revision to SEMI E135, Test Method for RF Generators to Determine Transient Response
New SNARF to be issued for two-week global Metrics TC Member review and GCS approval |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | TF | Details |
5596A | Cycle 4/5-17 | EMC TF | New Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment |
6144 | Cycle 4/5-17 | E-COO | Line-item Revision to SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
6145 | Cycle 4/5-17 | E-COO | Line-item Revision to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment |
6146 | Cycle 4/5-17 | E-COO | Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
5596 | EMC | New Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment | 04/29/2018 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
SEMICON West Standards Meetings, San Francisco, CA
Tuesday, July 11 (Tentative)
Wednesday, July 12 (Tentative)
Check http://www.semi.org/en/standards-events for details.
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