SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 04/04/2023 |
| Meeting End Date: 04/04/2023 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 04/18/2023 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
| Facilities |
| None | | | |
| Gases |
| 7052 | SNARF | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F20-0706,Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components used in General Purpose, High Purity and Ultra-high Purity Semiconductor Manufacturing Applications |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| Facilities |
| None | | | |
| Gases |
| 6394 | Cycle 4, or 5-2023 | Materials of Construction of Gas Delivery Systems TF | Line Item Revision to SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems |
| 6916 | Cycle 4, or 5-2023 | Heater Jacket TF | Replacement of SEMI F109-0212, Guide for Heater Systems Requirements,
as a New Standard: Guide for Material Selection for Heater Systems |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| Facilities |
| 6628 | BIM TF | New Standard: Guide for Facilities Data Package for Semiconductor Manufacturing Equipment Installation and Building Information Modeling | Spring 2024 |
| Gases |
| 6612 | Materials of Construction of Gas Delivery Systems TF | New Subordinate Standard, Test Method for the Determination of Conductance of Fluid Handling Components at Subatmoshperic and Vacuum Pressure, to SEMI F32-0211, Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves | Spring 2024 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Standard Designation | Title |
| Facilities |
| None | |
| Gases |
| SEMI C14 | Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges |
| SEMI F29 | Test Method for Purge Efficacy of Gas Source System Panels |
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is scheduled for the week of July 10-13, in conjunction with SEMICON West 2023. Schedule details TBD. Please check www.semi.org/standards for updates.
Tentative Schedule
Monday, July 10
o 9:00, Materials of Construction of Gas Delivery Systems
o 10:00, Filters & Purifiers
o 11:00, Mass Flow Controller
o 13:00, Gases Specification
o 13:00-14:30? TBD, Voltage Sag Immunity TF
o 14:00, Heater Jacket
o 15:00-16:00? TBD, BIM TF
Tuesday, July 11
9:00-12:00 Noon, Facilities & Gases NA TC Chapter
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