SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 10/28/2013
Meeting End Date: 10/28/2013
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 11/07/2013


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
The committee met to review action items and obtain updates from all chartered TFs. No ballots were adjudicated and there were no new activities.

Next Meeting
The next N.A. MEMS / NEMS standards meetings are tentatively scheduled for March 31, 2014 at SEMI Headquarters in San Jose, CA in conjunction with the NA Standards Spring 2014 meetings. Exact meeting date and details will be announced when finalized and available at http://www.semi.org/node/47781

Tentative Schedule:
Monday, March 31
          · Wafer Bond TF (9:00 AM - 10:00 AM)
          · Microfluidics TF (10:00 AM - 11:00 AM)
          · Packaging TF (11:00 AM - 11:30 AM)
          · Terminology TF (11:30AM - 12:30 PM)
          · Materials Characterization TF (1:30 PM - 2:30 PM)
          · N.A. MEMS / NEMS Committee (2:30 PM - 4:30 PM)

*All times are in PST. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit

http://www.semi.org/node/47781