SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: OVTCCM
Date of Meeting: 04/14/2021
Meeting End Date: 04/14/2021
Recording SEMI Standards Staff: Michelle Sun
CER Posted to Web: 04/27/2021


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6467Line-Item Revision to SEMI E129-0912, Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility6467_Ballot Report.pdf6467_Ballot Report.pdf
LI-1Update ITRS referencesPassed with editorial changes
LI-2Update referenced documents and remove obsolete or outdated documentsPassed
LI-3Editorial and minor technical changesPassed
6468Line-Item Revision to SEMI E78-0912, Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment6468_Ballot Report.pdf6468_Ballot Report.pdf
LI-1Update ITRS referencesPassed with editorial changes
LI-2Update referenced documents and remove obsolete or outdated documentsPassed
LI-3Editorial and minor technical changesPassed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
N/ALiaison RequestEMC TFType III liaison request with IEC TC 77
N/ALiaison RequestESD/ESC TFType II liaison request with Electrostatic Discharge Association (ESDA)


Authorized Activities

#
Type
SC/TF/WG
Details
6785New SNARFE-RAMP TFLINE ITEM REVISIONS TO SEMI E10-0221: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
6786New SNARFE-RAMP TFLINE ITEM REVISIONS TO SEMI E79-0221: Specification for Definition and Measurement of Equipment Productivity


Authorized Ballots

#
When
TF
Details
6785Cycle 5-2021E-RAMP TFLINE ITEM REVISIONS TO SEMI E10-0221: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
6786Cycle 5-2021E-RAMP TFLINE ITEM REVISIONS TO SEMI E79-0221: Specification for Definition and Measurement of Equipment Productivity
6676Cycle 5-2021RF Measurements TFRevision to SEMI E136-1104 (Reapproved 0512)
TEST METHOD FOR DETERMINING THE OUTPUT POWER OF RF
GENERATORS USED IN SEMICONDUCTOR PROCESSING
EQUIPMENT RF POWER DELIVERY SYSTEMS


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
August 4, 2021, 1-5 PM PT via OVTCCM