SEMI International Standards
Standards Locale: North America |
Committee: Metrics |
Place of Meeting: OVTCCM |
Date of Meeting: 04/14/2021 |
Meeting End Date: 04/14/2021 |
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Recording SEMI Standards Staff: Michelle Sun |
CER Posted to Web: 04/27/2021 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
N/A | Liaison Request | EMC TF | Type III liaison request with IEC TC 77 |
N/A | Liaison Request | ESD/ESC TF | Type II liaison request with Electrostatic Discharge Association (ESDA) |
Authorized Activities
# | Type | SC/TF/WG | Details |
6785 | New SNARF | E-RAMP TF | LINE ITEM REVISIONS TO SEMI E10-0221: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization |
6786 | New SNARF | E-RAMP TF | LINE ITEM REVISIONS TO SEMI E79-0221: Specification for Definition and Measurement of Equipment Productivity |
Authorized Ballots
# | When | TF | Details |
6785 | Cycle 5-2021 | E-RAMP TF | LINE ITEM REVISIONS TO SEMI E10-0221: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization |
6786 | Cycle 5-2021 | E-RAMP TF | LINE ITEM REVISIONS TO SEMI E79-0221: Specification for Definition and Measurement of Equipment Productivity |
6676 | Cycle 5-2021 | RF Measurements TF | Revision to SEMI E136-1104 (Reapproved 0512)
TEST METHOD FOR DETERMINING THE OUTPUT POWER OF RF
GENERATORS USED IN SEMICONDUCTOR PROCESSING
EQUIPMENT RF POWER DELIVERY SYSTEMS |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
August 4, 2021, 1-5 PM PT via OVTCCM
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