SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: SEMI HQ, San Jose, CA
Date of Meeting: 04/05/2016
Meeting End Date: 04/05/2016
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 04/14/2016


Leadership Changes

Group
Previous Leader
New Leader
Gases Specification TFMark Ripkowski - retiredOpen


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5964
Line item revision to SEMI E56-0314, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers
Line Item 1
Correct Formula 1Failed, send back to TF for rework
Line Item 2
Correct Formula 2Failed, send back to TF for rework
Line Item 3
Correct Formula 6Failed, send back to TF for rework
Line Item 4
Correct Formula 16Failed, send back to TF for rework
5963
Line Item Revision to SEMI F62-0701 (Reapproved 1111) Test Method For Determining Mass Flow Controller Performance Characteristics From Ambient And Gas Temperature Effects
Line Item 1
Changes to formula 1, 2, 4 and modify terminology 5.3.8Failed, send back to TF for rework
3440B
New Standard: Test Method for Pressure Measurement DevicesFailed, send back to TF for rework


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5997SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C3-0413, Specifications for Gases
5998SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen
5999SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
6000SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon
6001SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C58-1213, Specifications for Hydrogen
6002SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen
6003SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)
6004SNARFGases Specification TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6)


Authorized Ballots

#
When
SC/TF/WG
Details
3440CCycle 4 or 5, 2016Pressure Measurement TFNew Standard: Test Method for Pressure Measurement Devices
5816BCycle 5, 2016Filters and Purifiers TFLine item Revision to SEMI F30-0710, Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site with title change to Test Method for the Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
5244BCycle 5, 2016Filters and Purifiers TFRevision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments
5155Cycle 5, 2016BIM TFNew Standard, Guide for Building Information Modeling (BIM) for Semiconductor Capital Equipment
5997Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C3-0413, Specifications for Gases
5998Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen
5999Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
6000Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon
6001Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C58-1213, Specifications for Hydrogen
6002Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen
6003Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)
6004Cycle 4 or 5, 2016Gases Specifications TFA line item revision for title change to be conforming to SEMI Standards to document
SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6)


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting of the North America Facilities & Gases TC Chapter meeting committee is scheduled for Tuesday, July 12, 2016 at SEMICON West 2016 Standards Meetings in San Francisco, California. For more information, please visit: http://www.semi.org/standards