SEMI International Standards
Standards Locale: North America |
Committee: Facilities & Gases |
Place of Meeting: SEMI HQ, San Jose, CA |
Date of Meeting: 04/05/2016 |
Meeting End Date: 04/05/2016 |
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Recording SEMI Standards Staff: Laura Nguyen |
CER Posted to Web: 04/14/2016 |
Leadership Changes
Group | Previous Leader | New Leader |
Gases Specification TF | Mark Ripkowski - retired | Open |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5964 | Line item revision to SEMI E56-0314, Test Method For Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, And Dead Band Of Thermal Mass Flow Controllers | | |
Line Item 1 | Correct Formula 1 | Failed, send back to TF for rework | |
Line Item 2 | Correct Formula 2 | Failed, send back to TF for rework | |
Line Item 3 | Correct Formula 6 | Failed, send back to TF for rework | |
Line Item 4 | Correct Formula 16 | Failed, send back to TF for rework | |
5963 | Line Item Revision to SEMI F62-0701 (Reapproved 1111) Test Method For Determining Mass Flow Controller Performance Characteristics From Ambient And Gas Temperature Effects | | |
Line Item 1 | Changes to formula 1, 2, 4 and modify terminology 5.3.8 | Failed, send back to TF for rework | |
3440B | New Standard: Test Method for Pressure Measurement Devices | Failed, send back to TF for rework | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5997 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C3-0413, Specifications for Gases |
5998 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen |
5999 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2) |
6000 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon |
6001 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C58-1213, Specifications for Hydrogen |
6002 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen |
6003 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) |
6004 | SNARF | Gases Specification TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6) |
Authorized Ballots
# | When | SC/TF/WG | Details |
3440C | Cycle 4 or 5, 2016 | Pressure Measurement TF | New Standard: Test Method for Pressure Measurement Devices |
5816B | Cycle 5, 2016 | Filters and Purifiers TF | Line item Revision to SEMI F30-0710, Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site with title change to Test Method for the Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site |
5244B | Cycle 5, 2016 | Filters and Purifiers TF | Revision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments |
5155 | Cycle 5, 2016 | BIM TF | New Standard, Guide for Building Information Modeling (BIM) for Semiconductor Capital Equipment |
5997 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C3-0413, Specifications for Gases |
5998 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen |
5999 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2) |
6000 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon |
6001 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C58-1213, Specifications for Hydrogen |
6002 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen |
6003 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) |
6004 | Cycle 4 or 5, 2016 | Gases Specifications TF | A line item revision for title change to be conforming to SEMI Standards to document
SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting of the North America Facilities & Gases TC Chapter meeting committee is scheduled for Tuesday, July 12, 2016 at SEMICON West 2016 Standards Meetings in San Francisco, California. For more information, please visit: http://www.semi.org/standards
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