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Standards Locale: North America

Committee: Liquid Chemicals

Place of Meeting: SEMI HQ, Milpitas, CA

Date of Meeting: 04/04/2017

Meeting End Date: 04/04/2017

Recording SEMI Standards Staff: Inna Skvortsova

CER Posted to Web:

Document #	Document Title	Committee Action	A&R Forms for Approved Ballots
5943	Revision to SEMI E49.2-1104, Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment.	Passed (with editorial changes)	5943_Procedural Review.pdf
6086	Revision to SEMI F75-1102, Guide For Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing	Passed (with editorial changes)	6086_Procedural Review.pdf
6129	Revision to SEMI F61-0301 (Reapproved 0309) Guide for Ultrapure Water System Used in Semiconductor Processing, with title change to: Guide to Design and Operation of a Semiconductor Ultrapure Water System	Passed (with editorial changes)	6129_Procedural Review.pdf

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#	Type	SC/TF/WG	Details
6129	SNARF	UPW TF	Revision to SEMI F61-0301 (Reapproved 0309), Guide for Ultrapure Water System Used in Semiconductor Processing, with title change to: Guide to Design and Operation of a Semiconductor Ultrapure Water System Approved by GCS 12/16/2016
6136	SNARF	UPW TF	Revision to SEMI F98-0305 (Reapproved 1111), Guide for Treatment of Reuse Water in Semiconductor Processing Approved by GCS 12/16/2016

Authorized Activities

#	SC/TF/WG	Details
TBD	CAM	Revision to SEMI C45-0309E, Specification and Guideline for Tetraethylorthosilicate (TEOS) with title change to: Specification and Guide for Tetraethylorthosilicate (TEOS) New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 7/8-17.
TBD	CAM	Line Item Revision to SEMI C30-1110, Specifications for Hydrogen Peroxide to correct nonconforming title to: Specification for Hydrogen Peroxide New SNARF
TBD	HPPM&C	Revision to SEMI F104, Particle Test Method for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems New SNARF, for 2 weeks review and GCS approval, target ballot in Cycle 7-17.

Authorized Ballots

#	When	TF	Details
5831	Cycle 5-17	CAM	Revision to SEMI C27-0708, Specifications and Guideline for Hydrochloric Acid with title change to: Specification and Guide for Hydrochloric Acid
5642	Cycle 5-17	CAM	Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid
TBD	Cycle 5-17	CAM	Line Item Revision to SEMI C30-1110, Specifications for Hydrogen Peroxide ,to correct nonconforming title to: Specification for Hydrogen Peroxide
6136	Cycle 7-17	UPW	Revision to SEMI F98-0305 (Reapproved 1111), Guide for Treatment of Reuse Water in Semiconductor Processing

SNARF(s) Granted a One-Year Extension

#	TF	Title	Expiration Date
4957	CAM	Revision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol, with title change to: Specifications for 2-Propanol	04/06/2018
5642	CAM	Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid for Nitric Acid	08/07/2018

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status

Standard Designation	Title
SEMI C22-0212	Guide for Boron Tribromide
SEMI C38-0212	Guide for Phosphorus Oxychloride
SEMI C25-0312	Specification for Dichloromethane (Methylene Chloride)
SEMI C46-0812	Guide for 25% Tetramethylammonium Hydroxide
SEMI C47-0812	Guide for Trans 1,2 Dichloroethylene
SEMI C48-0812	Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade
SEMI C26-0912	Specification and Guide for Hexamethyldisilazane (HMDS)
SEMI C21-0708	Specifications and Guideline for Ammonium Hydroxide

Special Announcements of the Committee (Workshops, Programs, etc.)


Next Meeting

Monday, July 10 2017; SEMICON West, San Francisco CA
· High Purity Polymer Materials & Components (8AM – 9:30AM)
· UPW Task Force (9:30AM – 11AM)
- F61 – UPW Systems Guidelines;
- F75 – UPW Monitoring;
- C79 – UPW Filtration Efficiency;
- F98 – Water Reuse;
- UPW Quality - F63 Revision;
· High Purity Liquid Assemblies and Systems TF (1PM - 3PM)

Tuesday, July 11 2017; SEMICON West, San Francisco CA
· Chemical Analytical Methods TF (8AM – 11AM)
· NA Liquid Chemicals TC Chapter (2PM - 5PM)