SEMI International Standards
| Standards Locale: Europe |
| Committee: Compound Semiconductor Materials |
| Place of Meeting: Munich, Germany |
| Date of Meeting: 11/16/2023 |
| Meeting End Date: 11/16/2023 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 11/20/2023 |
Leadership Changes
None.
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
| SiC Epi Defects Task Force (New TF)
- Leader - Christian Kranert (Fraunhoffer)
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| Silicon Carbide Engineered Substrate Task Force (New TF)
- Leader - Enrica Cela (SOITEC)
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Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7161 | SNARF | Test Methods TF | Line Item Revision of SEMI M93 - Test Method for Quantifying Basal Plane Dislocation Density in 4H-SiC by X-Ray Diffraction Topography/Imaging |
| 7160 | SNARF | SiC Epi Defects TF | New Standard: Guide for Defects found in Homoepitaxial Layers of Silicon Carbide |
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Authorized Ballots
# | When | TF | Details |
| 7161 | Cycle 9, 1 or 2-2024 | Test Methods TF | Line Item Revision of SEMI M93 - Test Method for Quantifying Basal Plane Dislocation Density in 4H-SiC by X-Ray Diffraction Topography/Imaging |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
April 9, 2024 via OVTCCM, 7:30 -9:30 AM Pacific. Check www.semi.org/standards for the latest update..
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