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Standards Locale: North America

Committee: Facilities & Gases

Place of Meeting: San Francisco Marriott Marquis Hotel, California/USA

Date of Meeting: 07/11/2017

Meeting End Date: 07/11/2017

Recording SEMI Standards Staff: Laura Nguyen

CER Posted to Web: 07/24/2017

WG/TF/SC/TC Name	Previous Leader	New Leader
Facilities
None
Gases
Heater Jacket Task Force		Matt Milburn - UCT

Document #	Document Title	Committee Action	A&R Forms for Approved Ballots
Facilities
R6105	Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology	N/A	R6105ProceduralReview_pass.pdf
5155A	New Standard, Guide for Facilities Data Package for Semiconductor Equipment Installation and Building Information Modeling	Failed, returned to the TF for rework and reballot
Gases
R6119	Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with Title Change to Test Method for Measurement of Mass Flow Controller Transient Characteristics	N/A	R6119ProceduralReview_pass.pdf
6056B	Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller	Passed, Ratification Ballot to be issued	6056BProceduralReview.pdf
6178	Line Item Revision to Correct the Title of SEMI F37-0299 (Reapproved 0611), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components		6178ProceduralReview.pdf
Line Item 1	Correct nonconforming title per SEMI Standards Procedure Manual to "Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components”	Passed, as balloted
6180	Reapproval of SEMI F64-0701 (Reapproved 1111), Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers	Passed, as balloted	6180ProceduralReview.pdf
6181	Reapproval of SEMI F76-0303 (Reapproved 1110), Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas	Passed, with editorial changes	6181ProceduralReview.pdf
6188	Reapproval of SEMI F54-1000 (Reapproved 1110), Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters	Passed, as ballot	6188ProceduralReview.pdf
6182	Reapproval of SEMI C9.1-0212, Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures	Passed, as balloted	6182ProceduralReview.pdf
6186	Reapproval of SEMI C3.58-1011, Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality	Passed, as balloted	6186ProceduralReview.pdf
SEMI E137	SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment (Delete “NOTE 2:…” after Section 3.1)	Passed, to be submitted to ISC A&R SC	Editorial Change to E137_ProceduralReview.pdf

Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
Listing of all revised or new SNARF(s) approved by the TC Chapter.

#	Type	SC/TF/WG	Details
Facilities
6210	SNARF	NA Facilities Committee	Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix
Gases
R6056B	RB	Mass Flow Controller TF	Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller
6125	SNARF	Gases Specification TF	Line Item Revision to Correct the Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases -Revise the SNARF to address the negative, and send out for two-week member review followed by GCS
6211	SNARF	Materials of Construction of Gas Delivery Systems TF	Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution Systems
6213	SNARF	Materials of Construction of Gas Delivery Systems TF	Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems
6214	SNARF	Mass Flow Controller TF	Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers
6215	SNARF	Mass Flow Controller TF	Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers
6216	SNARF	Mass Flow Controller TF	Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers
6212	SNARF	Filters & Purifiers TF	Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas Filters
6219	SNARF	EU Gases and Liquid Chemicals Committee	Reapproval of SEMI C52-0301 (Reapproved 0312), Specification for the Shelf Life of a Specialty Gas -To be adjudicated at SEMICON Europa 2017
6217	SNARF	EU Gases and Liquid Chemicals Committee	Reapproval of SEMI C3.56-0312, Specification for Diborane Mixtures -To be adjudicated at SEMICON Europa 2017
6218	SNARF	EU Gases and Liquid Chemicals Committee	Reapproval of SEMI C3.57-0312, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders -To be adjudicated at SEMICON Europa 2017

Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.

#	When	TF	Details
Facilities
6210	Cycle 6 or 7, 2017	NA Facilities Committee	Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix
Gases
R6056B	Cycle 6, 2017	Mass Flow Controller TF	Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller
6125A	Cycle 7, 2017	Gases Specification TF	Revision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases
6211	Cycle 6 or 7, 2017	Materials of Construction of Gas Delivery Systems TF	Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution Systems
6213	Cycle 6 or 7, 2017	Materials of Construction of Gas Delivery Systems TF	Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems
6214	Cycle 6 or 7, 2017	Mass Flow Controller TF	Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers
6215	Cycle 6 or 7, 2017	Mass Flow Controller TF	Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers
6216	Cycle 6 or 7, 2017	Mass Flow Controller TF	Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers
6212	Cycle 6 or 7, 2017	Filters & Purifiers TF	Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas Filters
6219	Cycle 6 or 7, 2017	EU Gases and Liquid Chemicals Committee	Reapproval of SEMI C52-0301 (Reapproved 0312), Specification for the Shelf Life of a Specialty Gas -To be adjudicated at SEMICON Europa 2017
6217	Cycle 6 or 7, 2017	EU Gases and Liquid Chemicals Committee	Reapproval of SEMI C3.56-0312, Specification for Diborane Mixtures -To be adjudicated at SEMICON Europa 2017
6218	Cycle 6 or 7, 2017	EU Gases and Liquid Chemicals Committee	Reapproval of SEMI C3.57-0312, Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders -To be adjudicated at SEMICON Europa 2017
6148	Cycle 6 or 7, 2017	EU Cleaning Gases Task Force	Guide for F2/N2/Ar cleaning gas mixtures used in Semiconductor manufacturing -To be adjudicated at SEMICON Europa 2017

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next meeting of the Facilities & Gases Joint North America TC Chapter is scheduled for Tuesday, November 7, at the SEMI Standards North America Fall 2017 Meetings located at SEMI Headquarters in Milpitas, California.
For more information, please visit the Standards Calendar at http://www.semi.org/en/standards.

Tentative Schedule:
Monday, November 6
Gases Task Force Meetings
09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
10:00-11:00 Filters and Purifiers (TF)
11:00-12:00 Mass Flow Controller (TF)
13:00-14:00 Gas Specification (TF)
14:00-15:00 Heater Jacket (TF)
Facilities Task Force Meetings
TBD Power Grid Harmonics (TF)
15:00-17:00 Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)

Tuesday, November 7
09:00-12:00 Facilities & Gases (C)