Standards Locale: North America

Committee: MEMS / NEMS

Place of Meeting: Marriott Marquis Hotel, San Francisco, California/USA

Date of Meeting: 07/13/2017

Meeting End Date: 07/13/2017

Recording SEMI Standards Staff: Laura Nguyen

CER Posted to Web: 07/24/2017

Document #	Document Title	Committee Action	A&R Forms for Approved Ballots
5267	New Standard, Specification for Microfluidic Port and Pitch Dimensions	Failed, returned to the TF for rework and reballot
6176	Reapproval of SEMI MS1-0307 (Reapproved 0812), Guide to Specifying Wafer-Wafer Bonding Alignment Target	Passed, as balloted	6176ProceduralReview.pdf
6177	Reapproval of SEMI MS10-0912, Test Method to Measure Fluid Permeation Through MEMS Packaging Materials	Passed, as balloted	6177ProceduralReview.pdf

NOTE 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

NOTE 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

#	When	TF	Details
5267A	Cycle 6 or 7, 2017	MEMS Microfluidics	New Standard, Specification for Microfluidic Port and Pitch Dimensions

SNARF(s) Granted a One-Year Extension
None..

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next meeting of the MEMS/NEMS North America TC Chapter is scheduled for Monday, November 6, at the SEMI Standards North America Fall 2017 Meetings located at SEMI Headquarters in Milpitas, California.
For more information, please visit the Standards Calendar at http://www.semi.org/en/standards.

Tentative Schedule:

Monday, November 6
13:00-13:30 Microfluidics (TF)
13:30-15:30 Joint MSIG, MEMS Substrate, and Material Characterization (TFs)
15:30-17:00 MEMS / NEMS (C)