SEMI International Standards
Standards Locale: Japan |
Committee: Liquid Chemicals |
Place of Meeting: SEMI Japan office, Tokyo |
Date of Meeting: 12/03/2013 |
Meeting End Date: 12/03/2013 |
|
Recording SEMI Standards Staff: Chie Yanagisawa |
CER Posted to Web: 12/20/2013 |
Leadership Changes
None
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
-- | Study Group | Ultrapure Water Evaluation Study Group | To discuss the evaluation method for quality of ultrapure water at POP/POU of semiconductor cleaning equipment |
-- | Study Group | Liquid Chemicals ESD Study Group | To discuss the evaluation method of electrostatic charge generated with flow of liquid chemical or ultrapure water in di-electric component |
Authorized Ballots
# | When | SC/TF/WG | Details |
5421A | Cycle2/3-2014 | Liquid Filter Task Force | New Standard: Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with ICP-MS |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Japan Standards Spring 2014 Meetings
Friday, April 11, 2013
15:00-17:00
SEMI Japan office, Tokyo
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