SEMI International Standards
Standards Locale: Japan
Committee: Liquid Chemicals
Place of Meeting: SEMI Japan office, Tokyo
Date of Meeting: 12/03/2013
Meeting End Date: 12/03/2013
Recording SEMI Standards Staff: Chie Yanagisawa
CER Posted to Web: 12/20/2013


Leadership Changes
None

Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
--Study GroupUltrapure Water Evaluation Study GroupTo discuss the evaluation method for quality of ultrapure water at POP/POU of semiconductor cleaning equipment
--Study GroupLiquid Chemicals ESD Study GroupTo discuss the evaluation method of electrostatic charge generated with flow of liquid chemical or ultrapure water in di-electric component


Authorized Ballots

#
When
SC/TF/WG
Details
5421ACycle2/3-2014Liquid Filter Task ForceNew Standard: Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with ICP-MS


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Japan Standards Spring 2014 Meetings
Friday, April 11, 2013
15:00-17:00
SEMI Japan office, Tokyo