SEMI International Standards
Standards Locale: Japan |
Committee: Gases |
Place of Meeting: SEMI Japan office, Tokyo |
Date of Meeting: 06/23/2017 |
Meeting End Date: 06/23/2017 |
|
Recording SEMI Standards Staff: Mizue Iwamura |
CER Posted to Web: 07/06/2017 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
5-year-review TF | Yoshifumi Machii (Fujikin) | Masafumi Kitano (Fujikin) |
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Standard Designation | Title |
SEMI F82-1012 | SPECIFICATION FOR DIMENSION OF MASS FLOW CONTROLLER/MASS FLOW METER FOR 1.125 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F83-1012 | SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F84-1012 | SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F85-1012 | SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F86-1012 | SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F87-1012 | SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F88-1012 | SPECIFICATION FOR DIMENSION OF STANDARD SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F90-1012 | SPECIFICATION FOR DIMENSION OF STANDARD SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F91-1012 | SPECIFICATION FOR DIMENSION OF COMPACT SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F92-1012 | SPECIFICATION FOR DIMENSION OF COMPACT SIZE THREE PORT COMPONENTS FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F93-1012 | SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.5 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F94-1012 | SPECIFICATION FOR DIMENSIONS OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
SEMI F95-1012 | SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS FOR 1.5 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting will be held as follows:
Date: Tuesday, December 12
Time: 13:00-15:00
Location: SEMI Japan office
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