SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 04/01/2014 |
| Meeting End Date: 04/01/2014 |
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| Recording SEMI Standards Staff: Michael Tran |
| CER Posted to Web: 04/14/2014 |
Leadership Changes
Group | Previous Leader | New Leader |
| Pressure Measurement TF | | Joyce Chen (UCT), TF co-leader
Jeff Christian (Wika), TF co-leader |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5671 | Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Failed committee review |  |
| 5672 | Revision of SEMI C3.32-1109, Specification for Chlorine (Cl2), 99.996% Quality | Passed committee review with editorial changes |  |
| 5673 | Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Failed committee review |  |
| 5674 | Revision of SEMI C3.37-1109, Specification for Hexafluoroethane (C2F6), 99.97% Quality | Passed committee review with editorial changes |  |
| 5668 | Withdrawal of SEMI E52-1213, Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers | Passed committee review.
Superclean |  |
| 5669 | Line Item Revisions of:
•SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation
•SEMI E54.18-1106 (Reapproved 1211), Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
•SEMI E54.22-0613, Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
•SEMI F79-0710, Guide for Gas Compatibility with Silicon Used in Gas Distribution Components
•SEMI F105-0708, Guide for Metallic Material Compatibility in Gas Distribution Systems | |  |
| Line Item 1 | Change all instances of SEMI E52 to AUX030 as noticed. | Passed committee review. | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
| --- | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components |
| --- | SNARF | Materials of Construction of Gas Delivery Systems TF | Line Item Revision to SEMI F73-0309 , Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components |
| --- | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F77-0703 (Reapproved 0310), Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5445 | Cycle 3 or 4,2014 | Materials of Construction of Gas Delivery Systems TF | Revision of SEMI F60-0306 (Reapproved 0611), Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components |
| --- | Cycle 3 or 4,2014 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components |
| --- | Cycle 3 or 4,2014 | Materials of Construction of Gas Delivery Systems TF | Line Item Revision to SEMI F73-0309 , Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components |
| --- | Cycle 3 or 4,2014 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F77-0703 (Reapproved 0310), Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SEMICON West 2014
July 8-10
Moscone Center, San Francisco
Register Today!
http://www.semiconwest.org/Participate/RegisterNow
Next Meeting
The next N.A. Facilities and Gases standards meetings are tentatively scheduled for July 7-8, 2014 at the San Francisco Marriott Marquis Hotel in San Francisco, California in conjunction with the NA Standards SEMICON West 2014 meetings. Exact meeting dates and details will be announced when finalized and will be available at: http://www.semi.org/node/49446
Tentative Schedule:
Monday, July 7*
Gases TFs
– Materials of Construction of Gas Delivery Systems TF (8:00 to 9:30)
– Filters and Purifiers TF (9:30 to 11:00)
– Mass Flow TF (11:00 to 12:00)
– Gas Specifications TF (13:00 to 14:00)
– Surface Mount Sandwich Component Dimensions TF (14:00 to 15:00)
– Pressure Measurement TF (15:00 to 17:00)
Facilities TFs
– SEMI F51 (Perfluoroelastomer) TF (10:00 - 12:00)
– Building Information Modeling (BIM) TF (15:00 - 17:00)
Tuesday, July 8*
– Facilities and Gases Committee (9:00 to 12:00)
*All times are in PST. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit http://www.semi.org/node/49446
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