SEMI International Standards
Standards Locale: North America |
Committee: MEMS / NEMS |
Place of Meeting: SEMI Headquarters in San Jose, California |
Date of Meeting: 11/03/2014 |
Meeting End Date: 11/03/2014 |
|
Recording SEMI Standards Staff: Michael Tran |
CER Posted to Web: 11/18/2014 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
4719B | Revision to SEMI MS3-0307, Terminology for MEMS Technology with title change to: Terminology for MEMS / NEMS Technology | Failed TC Chapter review and returned to the TF for re-work | 4719B Ballot Review Summary.doc |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the TC Chapter
# | Type | SC/TF/WG | Details |
5808 | SNARF | MEMS Packaging TF | Reapproval of SEMI MS8-0309, Guide to Evaluating Hermeticity of MEMS Packages |
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
4719C | Cycle 1, 2015 | MEMS Terminology TF | Revision to SEMI MS3-0307, Terminology for MEMS Technology |
5808 | Cycle 1, 2015 | MEMS Packaging TF | Reapproval of SEMI MS8-0309, Guide to Evaluating Hermeticity of MEMS Packages |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
Next Meeting
The next N.A. MEMS / NEMS standards meetings are tentatively scheduled for March 30, 2015 at SEMI Headquarters in San Jose, CA in conjunction with the NA Standards Spring 2015 meetings. Exact meeting date and details will be announced when finalized and available at the SEMI Standards Calendar of Events: http://www.semi.org/en/Standards/CalendarEvents
Tentative Schedule:
Monday, March 30
· Microfluidics TF (10:00 AM - 11:00 AM)
· Packaging TF (11:00 AM - 11:30 AM)
· Terminology TF (11:30AM - 12:30 PM)
· N.A. MEMS / NEMS Committee (2:30 PM - 4:30 PM)
*All times are in Pacific Time. Times and dates are subject to change without notice.
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