SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 11/03/2014
Meeting End Date: 11/03/2014
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 11/18/2014


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
4719BRevision to SEMI MS3-0307, Terminology for MEMS Technology with title change to: Terminology for MEMS / NEMS TechnologyFailed TC Chapter review and returned to the TF for re-work4719B Ballot Review Summary.doc4719B Ballot Review Summary.doc


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

Listing of all new TFOFs, SNARFs, and other activities approved by the TC Chapter
#
Type
SC/TF/WG
Details
5808SNARFMEMS Packaging TFReapproval of SEMI MS8-0309, Guide to Evaluating Hermeticity of MEMS Packages


Authorized Ballots

Listing of documents approved by the committee for letter ballot.
#
When
SC/TF/WG
Details
4719CCycle 1, 2015MEMS Terminology TFRevision to SEMI MS3-0307, Terminology for MEMS Technology
5808Cycle 1, 2015MEMS Packaging TFReapproval of SEMI MS8-0309, Guide to Evaluating Hermeticity of MEMS Packages


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)


Next Meeting
The next N.A. MEMS / NEMS standards meetings are tentatively scheduled for March 30, 2015 at SEMI Headquarters in San Jose, CA in conjunction with the NA Standards Spring 2015 meetings. Exact meeting date and details will be announced when finalized and available at the SEMI Standards Calendar of Events: http://www.semi.org/en/Standards/CalendarEvents

Tentative Schedule:
Monday, March 30

· Microfluidics TF (10:00 AM - 11:00 AM)
· Packaging TF (11:00 AM - 11:30 AM)
· Terminology TF (11:30AM - 12:30 PM)
· N.A. MEMS / NEMS Committee (2:30 PM - 4:30 PM)

*All times are in Pacific Time. Times and dates are subject to change without notice.