SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: San Francisco Marriott Marquis Hotel in San Francisco, California |
| Date of Meeting: 07/10/2014 |
| Meeting End Date: 07/10/2014 |
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| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: 07/24/2014 |
Leadership Changes
Group | Previous Leader | New Leader |
New Task Force:
Energetic Materials EHS Task Force
Approved by the EHS Global Coordinating Subcommittee (GCS) in June 2014. | | Steve Trammell (SEMATECH), Andy McIntyre (EORM) |
New Task Force:
S7 Task Force
Approved by the EHS Global Coordinating Subcommittee (GCS) in June 2014. | | Chris Evanston (Salus) |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 3, 2014 Ballots | | |
4316K | Line Item Revision to SEMI S2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-0712a, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment. Delayed Revision on Multiple Topics | |  |
Line Item 1 | Improvements to the FECS criteria | Failed, to be reballoted | |
Line Item 2 | Allowing additional flexibility to the UPS disconnect criteria | Failed, to be reballoted | |
Line Item 3 | Allowing an alternate grounding methodology from IEC 60204-33 and has been found to be useful with larger equipment | Failed, to be reballoted | |
4683C | Line Item Revisions to SEMI S2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure | |  |
Line Item 1 | Added explanatory materials for valid air sampling and measurement methods and accredited laboratories | Failed, to be reballoted | |
Line Item 2 | Added suggested clarification on reporting of sampling related to 23.5 | Failed, to be reballoted | |
5591 | Line Item Revisions to SEMI S2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed revisions related to fire protection | |  |
Line Item 1 | Audibility and visibility of annunciators of fire detection systems | Failed, to be reballoted | |
Line Item 2 | Location of manual activation devices of fire detection systems | Passed as balloted. Superclean | |
Line Item 3 | Audibility and visibility of annunciators of fire suppression systems | Failed, to be reballoted | |
Line Item 4 | Location of manual activation devices of fire suppression systems | Passed as balloted. Superclean | |
| Cycle 4, 2014 Ballots | | |
5009C | Line Item Revisions to SEMI S8-0712a, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Delayed Revisions on Multiple Topics | |  |
Line Item 1 | Ergonomic clearances clarification. These changes are intended to better define ergonomics-related clearances for equipment design and installation | Failed, to be reballoted | |
Line Item 2 | Modifications to Appendix 1, SESC checklist, Section 6 enclosed handle design guidelines to allow for a wider range of acceptable handle shapes and sizes | Failed, to be reballoted | |
Line Item 3 | Modifications to Appendix 1, SESC checklist, Section 7 to expand whole body clearance criteria to include equipment operation tasks and provide design criteria for a seated posture. Whole body clearance recommendations are separated into two categories: walking/crawling and working postures. Existing recommendations specific to maintenance and service tasks are moved to a new Section 11 | Failed, to be reballoted | |
5718 | Line Item Revisions to SEMI S10-0307E, Safety Guideline for Risk Assessment and Risk Evaluation Process | |  |
Line Item 1 | Addition of NOTE on product and equipment under consideration | Passed with editorial changes | |
Line Item 2 | Change “loss” to “harm” (section 5.1.1) | Passed as balloted | |
Line Item 3 | Remove Note 4 | Failed, to be reballoted | |
Line Item 4 | Clarification of the life cycle stages to be considered | Passed as balloted | |
Line Item 5 | Clarification section 6.5 on risk estimation, remove the term benchmarking. Multiple changes in the section | Failed, to be reballoted | |
Line Item 6 | Change “loss” to “harm” (Table A1-1) | Failed, to be reballoted | |
Line Item 7 | Add pointer to ISO 12100 | Failed, to be reballoted | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| --- | TFOF | Energetic Materials EHS TF | Charter: Develop EHS guidance for the entire supply chain to assist in timely and accurate characterization of energetic processing materials. Propose design considerations for equipment, delivery system, pump and abatement manufacturers. Identify handling, use and disposal best practices, as well as, operation, maintenance and emergency response criteria for end users.
Approved by the EHS Global Coordinating Subcommittee (GCS) in June 2014.
View Energetic Materials EHS TFOF |
| --- | TFOF | S7 TF | Charter: The purpose of this task force is to support the five year revision of SEMI S7. The task force will obtain comments and suggestions from SEMI membership on suggested changes and take the document through the SEMI balloting process.
Approved by the EHS Global Coordinating Subcommittee (GCS) in June 2014.
View S7 TFOF |
| 5761 | SNARF | Energetic Materials EHS TF | New Standard: EHS Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
Rationale: This SEMI Standards activity is intended to:
· Develop EHS guidance for the entire supply chain to assist in timely and accurate characterization of energetic processing materials.
· Propose design considerations for equipment, delivery system, pump and abatement manufacturers.
· Identify handling, use and disposal best practices, as well as, operation, maintenance and emergency response criteria for end users.
View SNARF # 5761 |
| 5760 | SNARF | S7 TF | Line Item Revisions to SEMI S7, Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
Rationale: Revise and update SEMI S7 – in accordance with 5 year review cycle.
View SNARF # 5760 |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5623 | Cycle 5, 2014 | S1 Revision TF | Revision to SEMI S1, Safety Guideline for Equipment Safety Labels |
| 5760 | Cycle 5, 2014 | S7 TF | Line Item Revisions to SEMI S7, Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications |
| 5591A | Cycle 5 or 6, 2014 | Fire Protection TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revision related to Fire Protection |
| 4316L | Cycle 6, 2014 | S22 TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 4683D | Cycle 6, 2014 | S2 Chemical Exposure TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions related to Chemical Exposure |
| 5625 | Cycle 6, 2014 | S2 Non-ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions related to non-ionizing radiation |
| 5718A | Cycle 6, 2014 | S10 TF | Line Item Revisions to SEMI S10-0307E, Safety Guideline for Risk Assessment and Risk Evaluation Process |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
New Auxiliary Information Approved
The North America EHS Committee approved Document 4966 – New Auxiliary Information: S2 Mapping into the Machinery Directive (2006/42/EC) Essential Health and Safety Requirements.
Developed by the S2 to Machinery Directive Mapping Task Force, the Auxiliary Information aims to provide an informative mapping of S2 paragraphs onto Machinery Directive Annex I (essentially health and safety requirements) paragraphs typically relevant to equipment in the semi/photovoltaic industries and perhaps additional commentary on what might be missing if an S2 paragraph is found to partly, but not completely, address an MD Annex I paragraph.
Reapproval Ballots for SEMI S5 and S27 to be issued in Cycle 8, 2014 Voting Period
The North America EHS Committee plans to submit reapproval ballots for the SEMI S5 (Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves) and S27 (Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports) Safety Guidelines, which will soon be due for 5-year review, for the first available cycle after the NA Standards Fall 2014 meetings (Cycle 8, 2014)
Next Meeting
North America Standards Fall 2014 Meetings
November 3-6, 2014
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
U.S.A.
Monday, November 3
- S22 (Electrical Safety) TF (9:00 AM to 10:30 AM)
- S7 Revision TF (10:30 PM to 12:00 Noon)
- EHS Process Meeting / Lunch Break (12:00 Noon to 1:00 PM)
- S2 Non-Ionizing Radiation TF (1:00 PM to 2:00 PM)
- S2 Chemical Exposure TF (2:00 PM to 3:30 PM)
- S6 Revision TF (3:30 PM to 5:00 PM)
- NA Seismic Liaison TF (5:00 PM to 6:00 PM)
Tuesday, November 4
- Fire Protection TF (9:00 AM to 10:30 AM)
- S10 TF (10:30 AM to 12:00 Noon)
- Energetic Materials EHS TF (1:00 PM to 2:00 PM)
- S1 Revision TF (2:00 PM to 3:30 PM)
- S8 Ergonomics TF (3:30 PM to 5:00 PM)
- S23 Revision Japan TF (5:00 PM to 6:00 PM)
Wednesday, November 5
- [ICRC (8:00 AM to 12:00 Noon)]
- EHS Leadership Meeting / Lunch Break (12:00 Noon to 1:00 PM)
- Hazardous Energy Control Isolation Devices TF (1:00 PM to 2:00 PM)
- Manufacturing Equipment Safety Subcommittee [MESSC] (2:00 PM to 4:00 PM)
- S2 Ladders & Steps TF (4:00 PM to 5:30 PM)
Thursday, November 6
- EHS Committee (9:00 AM to 6:00 PM)
For more information, please visit: http://www.semi.org/en/node/50511
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