SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: SEMI HQ, San Jose, CA
Date of Meeting: 11/03/2015
Meeting End Date: 11/03/2015
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 11/17/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5621CNew Preliminary Standard: Guide for Determining the Quality of Ion Exchanged Resin Used in Polish Applications of Ultrapure Water SystemPassed
5831ARevision to SEMI C27-0708, Specifications and Guideline for Hydrochloric Acid with title change to: Specification and Guide for Hydrochloric AcidFailed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
TF name revisionHigh Purity Liquid Assemblies & Systems TF Formerly named the F31, F39, and F41 Rewrite TF
TF name revisionHigh Purity Materials & Components TFFormerly named the F57 Revision TF
Authorized Ballots

#
When
SC/TF/WG
Details
5944Cycle 1-2016F63 Revision TFRevision to SEMI F63-0213, Guide for Ultrapure Water Used in Semiconductor Processing
SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)


Next Meeting
None.