SEMI International Standards
Standards Locale: Japan
Committee: Liquid Chemicals
Place of Meeting: SEMI Japan, Tokyo, Japan
Date of Meeting: 04/23/2018
Meeting End Date: 04/23/2018
Recording SEMI Standards Staff: Mizue Iwamura
CER Posted to Web: 04/27/2018


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
#6320Line Item Revision to SEMI C77-0912: TEST METHOD FOR DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 nm AND 100 nm
Line Item 1Correct the expressional accuracy in 6.4.1.Passed as balloted, Superclean6320_BallotReport.pdf6320_BallotReport.pdf
Line Item 2Correct the grammatical mistakes in Figure 1.Passed as balloted, Superclean
Line Item 3Correct the expression which may be misunderstood in 7.2.4 and Table 1.Passed as balloted, Superclean
Line Item 4Correct the mistake of the superscript notation and the numerical row in 7.2.4.Passed as balloted, Superclean
Line Item 5Specify the meaning of CV value in 7.5.3.1Passed as balloted, Superclean
Line Item 6Adjust the expression of temperature to the notation of SI unit in 6.2.2 and 6.5.2.Passed as balloted, Superclean


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
TBD
December 12 or 14, 2018 at SEMICON Japan