SEMI International Standards
Standards Locale: Japan |
Committee: Liquid Chemicals |
Place of Meeting: SEMI Japan, Tokyo, Japan |
Date of Meeting: 04/23/2018 |
Meeting End Date: 04/23/2018 |
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Recording SEMI Standards Staff: Mizue Iwamura |
CER Posted to Web: 04/27/2018 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
#6320 | Line Item Revision to SEMI C77-0912: TEST METHOD FOR DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 nm AND 100 nm | | |
Line Item 1 | Correct the expressional accuracy in 6.4.1. | Passed as balloted, Superclean | 6320_BallotReport.pdf |
Line Item 2 | Correct the grammatical mistakes in Figure 1. | Passed as balloted, Superclean |
Line Item 3 | Correct the expression which may be misunderstood in 7.2.4 and Table 1. | Passed as balloted, Superclean |
Line Item 4 | Correct the mistake of the superscript notation and the numerical row in 7.2.4. | Passed as balloted, Superclean |
Line Item 5 | Specify the meaning of CV value in 7.5.3.1 | Passed as balloted, Superclean |
Line Item 6 | Adjust the expression of temperature to the notation of SI unit in 6.2.2 and 6.5.2. | Passed as balloted, Superclean |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
TBD
December 12 or 14, 2018 at SEMICON Japan
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