SEMI International Standards
Standards Locale: North America |
Committee: Physical Interfaces & Carriers |
Place of Meeting: SEMI HQ in San Jose, CA |
Date of Meeting: 04/06/2016 |
Meeting End Date: 04/06/2016 |
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Recording SEMI Standards Staff: Laura Nguyen |
CER Posted to Web: 04/15/2016 |
Leadership Changes
Group | Previous Leader | New Leader |
EUV Reticle Handling TF | | Disbanded |
Int’l Process Module PIC TF (IPPI TF) | | Disbanded |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5950 | Reapproval of SEMI E1-1110 Specification for Open Plastic and Metal Wafer Carriers | Passed, Super clean | 5950ProceduralReview.doc |
5951 | Reapproval of SEMI E100-1104 (Reapproved 0710) Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles | Failed | |
5952 | Reapproval of SEMI E117-1104 (Reapproved 0710) Specification for Reticle Load Port | Passed, with editorial changes | 5952ProceduralReviewRev1.doc |
5953 | Reapproval of SEMI E131-0304 (Reapproved 0310) Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M | Failed | |
5954 | Reapproval of SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load Port | Failed | |
5955 | Line Item Revision to SEMI E63-1104 (Reapproved 1110) Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface with Title Change to: Specification for 300 mm Box Opener/Loader to Tool Standard Mechanical (BOLTS-M) Interface | Passed | 5955ProceduralReview.doc |
5956 | Line Item Revision to SEMI E57-0600 (Reapproved 1110) Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers with Title Change to: Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers | Passed | 5956ProceduralReview.doc |
5965 | Reapproval of SEMI E15-0698E2 (Reapproved 0310) Specification for Tool Load Port | Passed, Super clean | 5965ProceduralReview.doc |
5817 | Revision to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and Weight | Failed, returned to the TF for re-work | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5941 | SNARF | International Reticle SMIF Pod and Load Port Interoperability TF | Revisions to E111-1213, Add new Related Information Documenting Purge Locations for Reticle SMIF Pod Purging and E19-1213, E112-1213, and E117-1104 (Reapproved 0710), Add references to the new E111 Related Information section, to go out for Cycle 5, 2016 |
Authorized Ballots
# | When | SC/TF/WG | Details |
5941 | Cycle 5, 2016 | International Reticle SMIF Pod and Load Port Interoperability Task Force | Revisions to E111-1213, Add new Related Information Documenting Purge Locations for Reticle SMIF Pod Purging and E19-1213, E112-1213, and E117-1104 (Reapproved 0710), Add references to the new E111 Related Information section |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
To draft a proposal to the RSC to clarify the definition of "Inactive" in the Regulations. To be sent out for feedback and comments from all members.
Next Meeting
The next meeting of the NA PIC TC Chapter committee is scheduled for Wednesday, July 13, 2016 at the SEMICON West 2016 Standards Meetings in San Francisco, California.
For more information, please visit: http://www.semi.org/standards
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