SEMI International Standards
Standards Locale: North America
Committee: Physical Interfaces & Carriers
Place of Meeting: SEMI HQ in San Jose, CA
Date of Meeting: 04/06/2016
Meeting End Date: 04/06/2016
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 04/15/2016


Leadership Changes

Group
Previous Leader
New Leader
EUV Reticle Handling TFDisbanded
Int’l Process Module PIC TF (IPPI TF)Disbanded


Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5950
Reapproval of SEMI E1-1110 Specification for Open Plastic and Metal Wafer CarriersPassed, Super clean5950ProceduralReview.doc5950ProceduralReview.doc
5951
Reapproval of SEMI E100-1104 (Reapproved 0710) Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm ReticlesFailed
5952
Reapproval of SEMI E117-1104 (Reapproved 0710) Specification for Reticle Load PortPassed, with editorial changes5952ProceduralReviewRev1.doc5952ProceduralReviewRev1.doc
5953
Reapproval of SEMI E131-0304 (Reapproved 0310) Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-MFailed
5954
Reapproval of SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load PortFailed
5955
Line Item Revision to SEMI E63-1104 (Reapproved 1110) Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface with Title Change to: Specification for 300 mm Box Opener/Loader to Tool Standard Mechanical (BOLTS-M) InterfacePassed5955ProceduralReview.doc5955ProceduralReview.doc
5956
Line Item Revision to SEMI E57-0600 (Reapproved 1110) Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers with Title Change to: Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer CarriersPassed5956ProceduralReview.doc5956ProceduralReview.doc
5965
Reapproval of SEMI E15-0698E2 (Reapproved 0310) Specification for Tool Load PortPassed, Super clean5965ProceduralReview.doc5965ProceduralReview.doc
5817
Revision to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and WeightFailed, returned to the TF for re-work


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5941SNARFInternational Reticle SMIF Pod and Load Port Interoperability TFRevisions to E111-1213, Add new Related Information Documenting Purge Locations for Reticle SMIF Pod Purging and E19-1213, E112-1213, and E117-1104 (Reapproved 0710), Add references to the new E111 Related Information section, to go out for Cycle 5, 2016


Authorized Ballots

#
When
SC/TF/WG
Details
5941Cycle 5, 2016International Reticle SMIF Pod and Load Port Interoperability Task ForceRevisions to E111-1213, Add new Related Information Documenting Purge Locations for Reticle SMIF Pod Purging and E19-1213, E112-1213, and E117-1104 (Reapproved 0710), Add references to the new E111 Related Information section


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
To draft a proposal to the RSC to clarify the definition of "Inactive" in the Regulations. To be sent out for feedback and comments from all members.

Next Meeting
The next meeting of the NA PIC TC Chapter committee is scheduled for Wednesday, July 13, 2016 at the SEMICON West 2016 Standards Meetings in San Francisco, California.
For more information, please visit: http://www.semi.org/standards