SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: San Francisco Marriott Marquis Hotel in San Francisco, California
Date of Meeting: 07/07/2014
Meeting End Date: 07/07/2014
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 07/14/2014


Leadership Changes

Group
Previous Leader
New Leader
NA MEMS/NEMS TC ChapterSteve Martell (Sonoscan) as new cochair, pending NARSC approval


Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
4820Withdrawal of SNARFNA MEMS/NEMS TC ChapterSpecification for MEMS Reliability Design, Materials Selection, Process and Testing Method


The NA MEMS/NEMS TC Chapter approved the following documents to be transferred to the 3DS-IC Technical Committee (pending the
3DS-IC Technical Committee approval to accept them):

Document #
Document Title
SEMI MS1-0812Guide to Specifying Wafer-Wafer Bonding Alignment Targets
SEMI MS5-0813Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures


The NA MEMS/NEMS TC Chapter approved the following Task Force to be inactive status :
  • Materials Characterization TF
  • Reliability TF

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next N.A. MEMS / NEMS standards meetings are tentatively scheduled for November 3, 2014 at SEMI Headquarters in San Jose, CA in conjunction with the NA Standards Fall 2014 meetings. Exact meeting date and details will be announced when finalized and available at http://www.semi.org/en/node/50511

Tentative Schedule:
Monday, November 3:
          · Wafer Bond TF (9:00 AM - 10:00 AM)
          · Microfluidics TF (10:00 AM - 11:00 AM)
          · Packaging TF (11:00 AM - 11:30 AM)
          · Terminology TF (11:30AM - 12:30 PM)
          · N.A. MEMS / NEMS TC Chapter (2:30 PM - 4:30 PM)

*All times are in PDT. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit
http://www.semi.org/en/node/50511