SEMI International Standards
| Standards Locale: North America |
| Committee: MEMS / NEMS |
| Place of Meeting: SEMI Headquarters, Milpitas, California/USA |
| Date of Meeting: 11/04/2019 |
| Meeting End Date: 11/04/2019 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 11/08/2019 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| MEMS/NEMS NA TC Chapter | | Michelle Bourke (Lam Research) |
| MEMS Reliability Task Force (reactivated) | None | Allyson Hartzell (Veryst) |
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
| None | MEMS Reliability Task Force (reactivated) |
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 6018 | New Standard: Specification for Silicon Substrates used in Fabrication of MEMS Devices | Passed, as balloted. |  6018_Ballot Review_v2.pdf |
#1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
#2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
- | TFOF | MEMS Reliability TF | MEMS Reliability Task Force [Reactivated] |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| 6007 | Cycle
2-2020 | MEMS Material Characterization TF | New Standard: Guide for Use of Test Patterns for Characterizing a Deep Reactive Ion Etching (DRIE) Process |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SEMI MSIG Manufacturing WG plan to meet during Flex/MSTC 2020, Feb 24-27
Next Meeting
The next meeting is scheduled in conjunction with the NA Standards Spring 2020 Meetings at SEMI Headquarters in Milpitas, California, March 30-April 2, 2020. For more information, please visit the Standards Calendar at http://www.semi.org/standards.
Tentative Schedule:
Monday, March 30
TBD Microfluidics (TF)
10:00-12:00 MEMS / NEMS (C) and Joint MSIG, MEMS Substrate, and Material Characterization (TFs)
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