SEMI International Standards
Standards Locale: North America
Committee: Physical Interfaces & Carriers
Place of Meeting: San Francisco Marriott in San Francisco, California
Date of Meeting: 07/15/2015
Meeting End Date: 07/15/2015
Recording SEMI Standards Staff: David Bouldin
CER Posted to Web: 07/28/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for rework and reballoting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Cycle 4, 2015 Ballots
5867
Line item revision to SEMI E21-94 (Reapproved 0309), Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard with title change to: Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport and SEMI E21.1-0309, Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport Standard with title change to: Specification for Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport
Line Item 1: Correct title and concomitant text of SEMI E21Passed, Superclean 5867_LI_1&2_ProceduralReview.docx5867_LI_1&2_ProceduralReview.docx
Line Item 2: Correct title and concomitant text of SEMI E21.1Passed, Superclean5867_LI_1&2_ProceduralReview.docx5867_LI_1&2_ProceduralReview.docx
5868
Line item revision to SEMI E22-0697 (Reapproved 0309), Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard with title change to: Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume and SEMI E22.1-0309, Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume Standard with title change to: Specification for Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume
Line Item 1: Correct title and concomitant text of SEMI E22Passed, Superclean 5868_LI_1&2_ProceduralReviewRev1.docx5868_LI_1&2_ProceduralReviewRev1.docx
Line Item 2: Correct title and concomitant text of SEMI E22.1Passed, Superclean5868_LI_1&2_ProceduralReviewRev1.docx5868_LI_1&2_ProceduralReviewRev1.docx


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
International Reticle SMIF Pod and Load Port Interoperability TF Activity
At the North America NA PIC TC Chapter meeting held July 15, in conjunction with the NA Standards SEMICON West 2015 Meetings, they approved the creation of a new SNARF to revise E111 with references to the change added to E19, E112, and E117. Since the SNARF had not been issued for TC Member review in accordance with § 8.2.1 of the SEMI Standards Regulations, it will be sent for TC Member review, a request to the GCS for final approval of the SNARF, and a request to the GCS to approve a Letter Ballot for Cycle 7. Note that the TF wants to ballot adding this new Related Information section rather than authorizing publication as unballoted additions.

Next Meeting
Fall NA Standards Meetings
November 2-5, 2015
Location (Tentative)
SEMI Headquarters or Intel (Robert Noyce Building)
3081 Zanker Road 2200 Mission College Blvd
San Jose, CA 95134 Santa Clara, CA 95054
U.S.A. U.S.A.

Wednesday, November 3 (Tentative)
- International Reticle SMIF Pod and Load Port Interoperability TF (8:00 AM to 9:00 AM)
- Global PIC Maintenance TF (9:00 AM to 10:00 AM)
- Joint Int'l 450 mm PIC/Int'l Process Module Physical Interface TFs (10:00 AM to 11:00 AM)
- NA 450mm Shipping Box TF (1:00 PM to 2:00 PM)

- Physical Interfaces and Carriers TC Chapter (2:00 PM to 5:00 PM)