SEMI International Standards
Standards Locale: Europe
Committee: Silicon Wafer
Place of Meeting: Dresden, Germany
Date of Meeting: 10/07/2015
Meeting End Date: 10/07/2015
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 10/15/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5737Revision of SEMI MF1391-1107 (Reapproved 0912), Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared AbsorptionFailed
5804Revision of SEMI M53-0310, Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodisperse Reference Spheres on Unpatterned Semiconductor Wafer SurfacesPassed
5859Line Item Revision of SEMI MF1811-0310, Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
Type of Document: Line-item revision to an existing Standard or Safety Guideline
LI 1Changed “a-priori” to “a priori” in ¶¶ 2.8, 4.2.16.1, and 4.2.28.1Passed
LI 2In ¶ 4.2.29.2.1, eliminated the line break in the inline equationPassed
LI 3In ¶ 5.3.1, added missing square bracket to Eq 29Passed
LI 4In ¶ 5.4.2, spelt bookkeeping without a hyphenPassed



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
4812SNARFInternational Advanced Wafer Geometry Task ForceNew Standard:Guide for Flatness Measurement on 450 mm Wafers. As part of the three-year SNARF review, this SNARF was abolished.
5893SNARFInternational Polished Wafers Task ForceThis revision of SEMI M1 is intended primarily to remove the listing of wafer categories in the Scope section so that modifications of this listing can be made with line item ballots and other items to bring the standard up to date.


Authorized Ballots

#
When
SC/TF/WG
Details
5893Cycle 8-2015International Polished Wafers Task ForceThis revision of SEMI M1 is intended primarily to remove the listing of wafer categories in the Scope section so that modifications of this listing can be made with line item ballots and other items to bring the standard up to date.


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
October 2016 in conjunction with SEMICON Europa in Grenoble, France. Date and time, when available, will be posted to http://www.semi.org/en/Standards/CalendarEvents