SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 11/04/2014 |
| Meeting End Date: 11/04/2014 |
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| Recording SEMI Standards Staff: Michael Tran |
| CER Posted to Web: 11/18/2014 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 5671A | Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality | Failed TC Chapter review and returned to the TF for rework |  5671A Ballot Review Summary.doc |
| 5673A | Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality | Failed TC Chapter review and returned to the TF for rework |  5673A Ballot Review Summary.doc |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5811 | SNARF | Gas Specifications TF | Reapproval of SEMI C3.35-1109E - Specification for Hydrogen Chloride (HCI), 99.997% Quality |
| 5812 | SNARF | Gas Specifications TF | Reapproval of SEMI C3.6-0710 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality |
| 5813 | SNARF | Mass Flow TF | Reapproval of SEMI E77-1104 (Reapproved 0710) - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases |
| 5814 | SNARF | Mass Flow TF | Reapproval of SEMI E80-0299 (Reapproved 0710) - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) |
| 5815 | SNARF | Filters and Purifiers TF | Reapproval of SEMI F28-1103 (Reapproved 0710) - Test Method for Measuring Particle Generation from Process Panels |
| 5816 | SNARF | Filters and Purifiers TF | Reapproval of SEMI F30-0710 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the TC Chapter for letter ballot.
# | Type | SC/TF/WG | Details |
| 5671B | Cycle 1 or 2, 2015 | Gas Specifications TF | Revision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality |
| 5673B | Cycle 1 or 2, 2015 | Gas Specifications TF | Revision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality |
| 5721A | Cycle 1 or 2, 2015 | Gas Specifications TF | Revision to SEMI C71-0611, Specification and Guide for Boron Trichloride (BCI3) with title change to: Specification for Boron Trichloride (BCI3) |
| 5811 | Cycle 1 or 2, 2015 | Gas Specifications TF | Reapproval of SEMI C3.35-1109E - Specification for Hydrogen Chloride (HCI), 99.997% Quality |
| 5812 | Cycle 1 or 2, 2015 | Gas Specifications TF | Reapproval of SEMI C3.6-0710 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality |
| 5722A | Cycle 1 or 2, 2015 | Mass Flow TF | Line item revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers |
| 5813 | Cycle 1 or 2, 2015 | Mass Flow TF | Reapproval of SEMI E77-1104 (Reapproved 0710) - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases |
| 5814 | Cycle 1 or 2, 2015 | Mass Flow TF | Reapproval of SEMI E80-0299 (Reapproved 0710) - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) |
| 5595 | Cycle 1 or 2, 2015 | Surface Mount Sandwich Component Dimensions TF | New Standard: Guide for the Development of Dimensional Standards for “Sandwich” Surface Mount Components |
| 5667 | Cycle 1 or 2, 2015 | Filters and Purifiers TF | Revision to SEMI F112-0613, Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS) |
| 5815 | Cycle 1 or 2, 2015 | Filters and Purifiers TF | Reapproval of SEMI F28-1103 (Reapproved 0710) - Test Method for Measuring Particle Generation from Process Panels |
| 5816 | Cycle 1 or 2, 2015 | Filters and Purifiers TF | Reapproval of SEMI F30-0710 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site |
| 5714A | Cycle 8, 2014 | Materials of Construction of Gas Delivery Systems TF | Revision of SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components |
| 5715A | Cycle 1 or 2, 2015 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F77-0703 (Reapproved 0310), Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems |
| 5080A | Cycle 8, 2014 | SEMI F51 Revision TF | Revision of SEMI F51-0200 - Guide for Elastometric Sealing Technology |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next N.A. Facilities and Gases standards meetings are tentatively scheduled for March 30-31, 2015 at SEMI Headquarters in San Jose, California in conjunction with the NA Standards Spring 2015 meetings. Exact meeting dates and details will be announced when finalized and will be available at the SEMI Standards Calendar of Events: http://www.semi.org/en/Standards/CalendarEvents
Tentative Schedule:
Monday, March 30*
Gases TFs
– Materials of Construction of Gas Delivery Systems TF (8:00 to 9:30)
– Filters and Purifiers TF (9:30 to 11:00)
– Mass Flow TF (11:00 to 12:00)
– Gas Specifications TF (13:00 to 14:00)
– Surface Mount Sandwich Component Dimensions TF (14:00 to 15:00)
– Pressure Measurement TF (15:00 to 17:00)
Facilities TFs
– SEMI F51 (Perfluoroelastomer) TF (13:00 - 15:00)
– Building Information Modeling (BIM) TF (15:00 - 17:00)
Tuesday, March 31*
– Joint Facilities & Gases TC Chapters (9:00 to 12:00)
*All times are in Pacific Time. Times and dates are subject to change without notice.
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