SEMI International Standards
Standards Locale: North America |
Committee: Information & Control |
Place of Meeting: San Jose, CA |
Date of Meeting: 11/04/2015 |
Meeting End Date: 11/04/2015 |
|
Recording SEMI Standards Staff: James Amano |
CER Posted to Web: 11/17/2015 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5274F | Revision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard) | Failed | |
5821A | New Standard: Specification for Subsystem Energy Savings Mode Communication (SESMC) | Failed | |
5844A | Line Item Revision to SEMI E54, Sensor/Actuator Network Standard with title change to: Specification for Sensor/Actuator Network | | |
LI 1 | Correct Nonconforming Title of SEMI E54 | Passed | |
LI 2 | Correct Nonconforming Title of SEMI E54.1 | Passed | |
LI 3 | Correct Nonconforming Title of SEMI E54.2 | Passed | |
LI 4 | Correct Nonconforming Title of SEMI E54.4 | Passed | |
LI 5 | Correct Nonconforming Title of SEMI E54.11 | Passed | |
LI 6 | Correct Nonconforming Title of SEMI E54.20 | Passed | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5966 | SNARF | GEM300 TF | Line Item Revision to E90 (SPECIFICATION FOR SUBSTRATE TRACKING),
E90.1 (SPECIFICATION FOR SECS-II PROTOCOL SUBSTRATE TRACKING) |
5967 | SNARF | PCS TF | Line Item Revision to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS): Adding Virtual Metrology (VM) specifications |
Authorized Ballots
# | When | SC/TF/WG | Details |
5274G | Cycle 1-2016 | Sensor Bus Task Force | Revision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard) |
5821B | Cycle 1-2016 | Energy Saving Equipment Communication Task Force | New Standard: Specification for Subsystem Energy Savings Mode Communication (SESMC) |
5872 | Cycle 2-2016 | GEM 300 Task Force | Line Item Revisions to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD) |
5912 | Cycle 2-2016 | GEM 300 Task Force | Line Item Revisions to:
- SEMI E142.1 -0211, XML Schema for Substrate Mapping
- SEMI E142.2-0211, SECS II Protocol for Substrate Mapping
- SEMI E142.3-0211, Web Services for Substrate Mapping
To correct nonconforming titles |
5913 | Cycle 2-2016 | GEM 300 Task Force | Reapproval for SEMI E157-0611, Specification for Module Process Tracking |
5914 | Cycle 2-2016 | Sensor Bus Task Force | Reapproval for SEMI E54.3-0698 (Reapproved 1110), Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
NA Spring 2015 meetings at SEMI HQ in San Jose, CA. http://www.semi.org/Standards/CalendarEvents
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.