SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: San Jose, CA
Date of Meeting: 11/04/2015
Meeting End Date: 11/04/2015
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 11/17/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5274F
Revision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard)
Failed
5821A
New Standard: Specification for Subsystem Energy Savings Mode Communication (SESMC)
Failed
5844A
Line Item Revision to SEMI E54, Sensor/Actuator Network Standard with title change to: Specification for Sensor/Actuator Network
LI 1
Correct Nonconforming Title of SEMI E54
Passed
LI 2
Correct Nonconforming Title of SEMI E54.1
Passed
LI 3
Correct Nonconforming Title of SEMI E54.2
Passed
LI 4
Correct Nonconforming Title of SEMI E54.4
Passed
LI 5
Correct Nonconforming Title of SEMI E54.11
Passed
LI 6
Correct Nonconforming Title of SEMI E54.20
Passed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5966SNARFGEM300 TFLine Item Revision to E90 (SPECIFICATION FOR SUBSTRATE TRACKING),
E90.1 (SPECIFICATION FOR SECS-II PROTOCOL SUBSTRATE TRACKING)
5967SNARFPCS TFLine Item Revision to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS): Adding Virtual Metrology (VM) specifications


Authorized Ballots

#
When
SC/TF/WG
Details
5274G
Cycle 1-2016
Sensor Bus Task ForceRevision to Add a New Subordinate Standard: Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard)
5821B
Cycle 1-2016
Energy Saving Equipment Communication Task ForceNew Standard: Specification for Subsystem Energy Savings Mode Communication (SESMC)
5872
Cycle 2-2016
GEM 300 Task Force
Line Item Revisions to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)
5912
Cycle 2-2016
GEM 300 Task Force
Line Item Revisions to:
- SEMI E142.1 -0211, XML Schema for Substrate Mapping
- SEMI E142.2-0211, SECS II Protocol for Substrate Mapping
- SEMI E142.3-0211, Web Services for Substrate Mapping
To correct nonconforming titles
5913
Cycle 2-2016
GEM 300 Task Force
Reapproval for SEMI E157-0611, Specification for Module Process Tracking
5914
Cycle 2-2016
Sensor Bus Task Force
Reapproval for SEMI E54.3-0698 (Reapproved 1110), Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
NA Spring 2015 meetings at SEMI HQ in San Jose, CA. http://www.semi.org/Standards/CalendarEvents