SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: SEMI HQ, San Jose, CA
Date of Meeting: 04/04/2016
Meeting End Date: 04/04/2016
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 04/15/2016


Leadership Changes

Group
Previous Leader
New Leader
MEMS Substrate TFThis is a new task force.Chris Moore/Bay Tech-Resor


Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
TFOFMEMS Substrate TFDevelop and ballot specifications for substrates used to produce MEMS devices. While substrates used in MEMS fabrication share similarities with those used for IC production, they differ in important elements. MEMS substrates normally use SOI (silicon on Insulator) technology and have a much thicker device layer than equivalent IC wafers.
This task force is an outgrowth of the work being done by the MSIG-SEMI working group.
6018SNARFMEMS Substrate TFNew Standard: Specification for Silicon Substrates used in fabrication of MEMS Devices
6007SNARFMaterial Characterization TFNew Standard: Specification for a Test Pattern for Deep Reactive Ion Etching (DRIE) Process Characterization


Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
Sent to Inactive Status:
SEMI MS9-0611: Specification for High Density Permanent Connections Between Microfluidic Devices
Abandoned SNARFs:
New Standard: Standard Test Method for Electroosmotic Mobility in Microfluidic Systems [#4819]
New Standard: Test Method for Autofluorescence of Materials [#5268]


Next Meeting
The next meeting of the NA MEMS/NEMS TC Chapter committee is scheduled for Thursday, July 14, 2016 at the SEMICON West 2016 Standards Meetings in San Francisco, California.
For more information, please visit: http://www.semi.org/standards