SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: San Francisco Marriott Marquis Hotel in San Francisco, California
Date of Meeting: 07/08/2014
Meeting End Date: 07/08/2014
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 07/22/2014


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5080Revision of SEMI F51-0200, Guide for Elastometric Sealing TechnologyFailed committee review and returned to the TF for rework5080BallotReviewSummary.doc5080BallotReviewSummary.doc
5714Reapproval of SEMI F19-0304 (Reapproved 0310): Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel ComponentsFailed committee review and returned to the TF for rework.5714BallotReviewSummary.doc5714BallotReviewSummary.doc
5715Reapproval of SEMI F77-0703 (Reapproved 0310), Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas SystemsFailed committee review and returned to the TF for rework.5715BallotReviewSummary.doc5715BallotReviewSummary.doc
5712Revision to SEMI F73-0309, Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of
Stainless Steel Components		Passed committee review. Superclean.5712ProceduralReview.doc5712ProceduralReview.doc
5445Revision of SEMI F60-0306 (Reapproved 0611), Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel ComponentsPassed committee review with editorial changes.5445ProdeduralReview DRAFT.doc5445ProdeduralReview DRAFT.doc
5721Revision to SEMI C71-0611, Specification and Guide for Boron Trichloride (BCI3) with title change to: Specification for Boron Trichloride (BCI3)Failed committee review and returned to the TF for rework.5721BallotReviewSummary.doc5721BallotReviewSummary.doc
5722Line item revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers5722BallotReviewSummary.doc5722BallotReviewSummary.doc
Line Item 1Correction to Equation 5Failed committee review and returned to the TF for rework.



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

Listing of documents approved by the committee for letter ballot.
#
When
SC/TF/WG
Details
5671ACycle 5 or 6, 2014Gas Specifications TFRevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
5673ACycle 5 or 6, 2014Gas Specifications TFRevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality



SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next N.A. Facilities and Gases standards meetings are tentatively scheduled for November 3-4, 2014 at SEMI Headquarters in San Jose, California in conjunction with the NA Standards Fall 2014 meetings. Exact meeting dates and details will be announced when finalized and will be available at: http://www.semi.org/en/node/50511

Tentative Schedule:

Monday, November 3*
Gases TFs
– Materials of Construction of Gas Delivery Systems TF (8:00 to 9:30)
– Filters and Purifiers TF (9:30 to 11:00)
– Mass Flow TF (11:00 to 12:00)
– Gas Specifications TF (13:00 to 14:00)
– Surface Mount Sandwich Component Dimensions TF (14:00 to 15:00)
– Pressure Measurement TF (15:00 to 17:00)

Facilities TFs
– SEMI F51 (Perfluoroelastomer) TF (10:00 - 12:00)
– Building Information Modeling (BIM) TF (15:00 - 17:00)

Tuesday, November 4*
– Facilities and Gases Committee (9:00 to 12:00)

*All times are in PDT. Times and dates are subject to change without notice.
For meeting details, registration, the latest schedule, and travel information please visit http://www.semi.org/en/node/50511