SEMI International Standards
Standards Locale: North America |
Committee: Facilities & Gases |
Place of Meeting: SEMI HQ |
Date of Meeting: 11/07/2017 |
Meeting End Date: 11/07/2017 |
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Recording SEMI Standards Staff: Laura Nguyen |
CER Posted to Web: 11/15/2017 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
Facilities |
6210 | Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix | Failed | |
Gases |
R6056B | Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller | N/A | R6056BProceduralReview_pass.pdf |
6125A | Revision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases | Passed, Ratification Ballot to be issued | 6125AProceduralReview.pdf |
6211 | Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution Systems | Passed, as balloted | 6211ProceduralReview.pdf |
6213 | Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems | Failed | |
6214 | Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers | Failed | |
6215 | Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow Controllers | Failed | |
6216 | Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers | Failed | |
6212 | Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas Filters | Failed | |
NOTE 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
NOTE 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
Facilities |
None | | | |
Gases |
6125A | SNARF | Gases Specification TF | Revision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen Gas
– Revision SNARF distributed for two-week TC Member review
– GCS approved revision SNARF and authorized for ballot
– Balloted in Voting Cycle 7-17 |
6290 | SNARF | Filters & Purifiers TF | New Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems
– TC Member Review took place between 09/11/2017 and 09/25/2017 before approval by the GCS. GCS approval on 10/10/17. |
6291 | SNARF | Filters & Purifiers TF | New Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems
– TC Member Review took place between 09/11/2017 and 09/25/2017 before approval by the GCS. GCS approval on 10/10/17. |
Authorized Activities
Listing of all revised or new SNARF(s) approved by the TC Chapter.
# | Type | SC/TF/WG | Details |
Facilities |
6313 | SNARF | NA Facilities Committee | Reapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity
– Authorized new SNARF |
Gases |
6312 | SNARF | Heater Jacket TF | Reapproval of SEMI F109-0212, Guide for Heater Systems Requirements
– Authorized new SNARF |
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
# | When | TF | Details |
Facilities |
6313 | Cycle 9, 2017 | NA Facilities Committee | Reapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity |
Gases |
R6125A | Cycle 9, 2017 | Gases Specification TF | Revision to SEMI F23-0697 (Reapproved 0712), Specification for Particle Concentration of Grade 10/0.2 Hydrogen Gas |
6290 | Cycle 9, 2017 | Filters & Purifiers TF | New Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems |
6291 | Cycle 9, 2017 | Filters & Purifiers TF | New Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems |
6313 | Cycle 9, 2017 | Heater Jacket TF | Reapproval of SEMI F109-0212, Guide for Heater Systems Requirements |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Inactive, adj. — Status of a Standard or Safety Guideline that is not currently supported by the GTC. [Regulations 4.2.19]
Standard Designation | Title |
Facilities |
None | |
Gases |
SEMI F6 | Guide for Secondary Containment of Hazardous Gas Piping Systems |
SEMI F13 | Guide for Gas Source Control Equipment |
SEMI F14 | Guide for the Design of Gas Source Equipment Enclosures |
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting of the Facilities & Gases Joint North America TC Chapter is scheduled for Tuesday, April 10, at the SEMI Standards North America Spring 2018 Meetings located at SEMI Headquarters in Milpitas, California.
For more information, please visit the Standards Calendar at http://www.semi.org/en/standards.
Tentative Schedule:
Monday, April 9
Gases Task Force Meetings
09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
10:00-11:00 Filters and Purifiers (TF)
11:00-12:00 Mass Flow Controller (TF)
13:00-14:00 Gas Specification (TF)
14:00-15:00 Heater Jacket (TF)
Facilities Task Force Meetings
13:00-14:00 Power Grid Harmonics (TF)
TBD Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)
Tuesday, April 10
09:00-12:00 Facilities & Gases (C)
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