SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: SEMI HQ
Date of Meeting: 11/07/2017
Meeting End Date: 11/07/2017
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/15/2017


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Facilities
6210Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination MatrixFailed
Gases
R6056BRevision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow ControllerN/AR6056BProceduralReview_pass.pdfR6056BProceduralReview_pass.pdf
6125ARevision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty GasesPassed, Ratification Ballot to be issued6125AProceduralReview.pdf6125AProceduralReview.pdf
6211Reapproval of SEMI F22-0812, Guide for Bulk and Specialty Gas Distribution SystemsPassed, as balloted6211ProceduralReview.pdf6211ProceduralReview.pdf
6213Reapproval of SEMI F74-1103 (Reapproved 0710), Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery SystemsFailed
6214Reapproval of SEMI F53-0600 (Reapproved 0412), Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow ControllersFailed
6215Reapproval of SEMI F55-0600 (Reapproved 0412), Test Method for Determining the Corrosion Resistance of Mass Flow ControllersFailed
6216Reapproval of SEMI F56-0600 (Reapproved 0412), Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow ControllersFailed
6212Reapproval of SEMI F38-0699 (Reapproved 0611), Test Method for Efficiency Qualification of Point-of-Use Gas FiltersFailed
NOTE 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

NOTE 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#
Type
SC/TF/WG
Details
Facilities
None
Gases
6125ASNARFGases Specification TFRevision to SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases with title change to Specification for Particle Concentration of Grade 10/0.2 Hydrogen Gas
– Revision SNARF distributed for two-week TC Member review
– GCS approved revision SNARF and authorized for ballot
– Balloted in Voting Cycle 7-17
6290SNARFFilters & Purifiers TFNew Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems
TC Member Review took place between 09/11/2017 and 09/25/2017 before approval by the GCS. GCS approval on 10/10/17.
6291SNARFFilters & Purifiers TFNew Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems
TC Member Review took place between 09/11/2017 and 09/25/2017 before approval by the GCS. GCS approval on 10/10/17.


Authorized Activities
Listing of all revised or new SNARF(s) approved by the TC Chapter.
#
Type
SC/TF/WG
Details
Facilities
6313SNARFNA Facilities CommitteeReapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity
– Authorized new SNARF
Gases
6312SNARFHeater Jacket TFReapproval of SEMI F109-0212, Guide for Heater Systems Requirements
– Authorized new SNARF
Note 1: SNARFs and TFOFs are available for review on the SEMI Web site at:

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF


Authorized Ballots
Listing of documents authorized by the TC Chapter for Letter Ballot.
#
When
TF
Details
Facilities
6313Cycle 9, 2017NA Facilities CommitteeReapproval of SEMI F47-0706 (Reapproved 0812), Specification for Semiconductor Processing Equipment Voltage Sag Immunity
Gases
R6125ACycle 9, 2017Gases Specification TFRevision to SEMI F23-0697 (Reapproved 0712), Specification for Particle Concentration of Grade 10/0.2 Hydrogen Gas
6290Cycle 9, 2017Filters & Purifiers TFNew Standard, Test Method for the Determination of Hydrocarbons Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems
6291Cycle 9, 2017Filters & Purifiers TFNew Standard, Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Gas Delivery Components and Plumbing Systems
6313Cycle 9, 2017Heater Jacket TFReapproval of SEMI F109-0212, Guide for Heater Systems Requirements


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status

Inactive, adj. — Status of a Standard or Safety Guideline that is not currently supported by the GTC. [Regulations 4.2.19]
Standard Designation
Title
Facilities
None
Gases
SEMI F6Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI F13Guide for Gas Source Control Equipment
SEMI F14Guide for the Design of Gas Source Equipment Enclosures


Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next meeting of the Facilities & Gases Joint North America TC Chapter is scheduled for Tuesday, April 10, at the SEMI Standards North America Spring 2018 Meetings located at SEMI Headquarters in Milpitas, California.
For more information, please visit the Standards Calendar at
http://www.semi.org/en/standards.


    Tentative Schedule:
        Monday, April 9
        Gases Task Force Meetings
            09:00-10:00 Materials of Construction of Gas Delivery Systems (TF)
            10:00-11:00 Filters and Purifiers (TF)
            11:00-12:00 Mass Flow Controller (TF)
            13:00-14:00 Gas Specification (TF)
            14:00-15:00 Heater Jacket (TF)
        Facilities Task Force Meetings
            13:00-14:00 Power Grid Harmonics (TF)
            TBD Building Information Modeling (BIM) for Semiconductor Capital Equipment (TF)
        Tuesday, April 10
            09:00-12:00 Facilities & Gases (C)