SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: San Francisco Marriott Marquis - San Francisco_CA
Date of Meeting: 07/13/2017
Meeting End Date: 07/13/2017
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 07/24/2017


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Energetic Materials Task ForceSteve Trammell
Andy McIntyre		Eric Sklar (Safety Guru)
Kalysha Rivera (Tokyo Electron)
Manufacturing Equipment Safety SubcommitteeLauren Crane stepped down.
S3 Revision Task ForceMark Fessler (ASM)


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
S28 Revision Task Force (new)


Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5917ALine Item Revisions to SEMI S8-1116, Safety Guideline For Ergonomics Engineering Of Semiconductor Manufacturing Equipment (Revisions on Multiple Topics)5917A Procedural Review.pdf5917A Procedural Review.pdf
Line Item 1Revisions and additions to hand/arm clearancesPassed with technical changes. Ratification Ballot will be issued in cycle 6-1
Line Item 2Add a new Related Information section “Z” to assist with determining what tasks are within the scope of an assessment to SEMI S8Passed with editorial changes
6172Line Item Revision to SEMI S14-1016: Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (To correct nonconforming title)6172 Procedural Review.pdf6172 Procedural Review.pdf
Line Item 1Correct title and concomitant textsPassed as balloted
6049Line-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process
Line Item 1Changes to Appendix 1 Failed and reballot
Line Item 2 Addition of Related Information 6Failed and reballot


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6208SNARFS28 Revision TFLine Item Revision to SEMI S28-1011 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
6209SNARFS3 Revision TFRevision of S3 with title change, Safety Guideline for Process Liquid Heating Systems
6204SNARFS6 Revision TFLine Item Revisions to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
5996SNARFErgonomics Task ForceLine Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
(SNARF was revised to include additional loading criteria for items other than wafer cassettes, including single reticle containers)


Authorized Ballots

#
When
TF
Details
R5917ACycle 6-17Ergonomics Task ForceLine Item Revisions to SEMI S8-1116, Safety Guideline For Ergonomics Engineering Of Semiconductor Manufacturing Equipment (Revisions on Multiple Topics)
Line Item 1 - Revisions and additions to hand/arm clearances
6204Cycle 6 or 7-17S6 Revision TFLine Item Revisions to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
5761BCycle 6 or 7-17Energetic Materials TFNew Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
.

SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
4975S6 Revision Task ForceRevision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment (Line item revisions for addressing gas detectors and other concerns)July 13, 2018
5624S2 Chemical Exposure Task ForceRevision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Changes related to representative sampling July 13, 2018
5761Energetic Materials TFNew Standard: EHS Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes July 13, 2018



SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
November 9, 2017 9 AM - 6 PM in conjunction with NA Fall Standards Meeting at SEMI HQ in Milpitas, CA. Please check www.semi.org/standards under calendar for latest update