SEMI International Standards
Standards Locale: Japan
Committee: Liquid Chemicals
Place of Meeting: SEMI Japan office + OVTCCM
Date of Meeting: 05/26/2023
Meeting End Date:
Recording SEMI Standards Staff: Mami Nakajo
CER Posted to Web: 06/09/2023


Leadership Changes

WG/TF/SC/TC Name
Previous Leader
New Leader
Liquid-Borne Particle Counter TFKaoru Kondo ( RION)Masaki Shimmura (RION)
Liquid-Borne Particle Counter TFKazutoshi Kato ( PMS Division/Spectris)Mitsuyoshi Takeshita (Particle Measuring Systems)


Committee Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
None
Ballot Results


Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
6820ANew Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)Passed with editorial change6820A.pdf6820A.pdf
6979Revision to C77-0912, TEST METHOD FOR DETERMING THE COUNTING EFFICIENY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 nm AND 100 nm with title change to TEST METHOD FOR DETERMING THE COUNTING EFFICIENY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 20 nm AND 100 nmFailed and returned toTF for rework and reballot
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Friday December 8, 15::00-17:00[JST], SEMI Japan office via OVVTCCM