SEMI International Standards
Standards Locale: Japan |
Committee: Liquid Chemicals |
Place of Meeting: SEMI Japan office + OVTCCM |
Date of Meeting: 05/26/2023 |
Meeting End Date: |
|
Recording SEMI Standards Staff: Mami Nakajo |
CER Posted to Web: 06/09/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
Liquid-Borne Particle Counter TF | Kaoru Kondo ( RION) | Masaki Shimmura (RION) |
Liquid-Borne Particle Counter TF | Kazutoshi Kato ( PMS Division/Spectris) | Mitsuyoshi Takeshita (Particle Measuring Systems) |
Committee Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
None | |
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
6820A | New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline) | Passed with editorial change | 6820A.pdf |
6979 | Revision to C77-0912, TEST METHOD FOR DETERMING THE COUNTING EFFICIENY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 nm AND 100 nm with title change to TEST METHOD FOR DETERMING THE COUNTING EFFICIENY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 20 nm AND 100 nm | Failed and returned toTF for rework and reballot | |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Friday December 8, 15::00-17:00[JST], SEMI Japan office via OVVTCCM
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.