SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: SEMI HQ, Milpitas, CA |
| Date of Meeting: 11/09/2017 |
| Meeting End Date: 11/09/2017 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 11/14/2017 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| S3 Revision TF | Mark Fessler (ASM) | Glenn Holbrook (ASM) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5761B | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes | Failed and returned to TF for reballot | |
| 6204 | Line Item Revisions to SEMI S6-0707E With Title Change To: Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | See below |  6204 Procedural Review.pdf |
| Line Item 1 | Title change to align with procedure manual | Passed as balloted | |
| Line Item 2 | Add Table of Contents and remove list of sections from scope section | Passed with editorial changes | |
| Line Item 3 | Update retroactive clause to refer to more versions than S6-93 and align with S2 revision | Passed with technical changes. Ratification Ballot will be issued. | |
| Line Item 4 | Clean up some references to other documents | Passed as balloted | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 6309 | SNARF | Ergonomics TF | Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 6310 | SNARF | S28 Revision TF | Reapproval of SEMI S28-1011 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment |
Authorized Ballots
# | When | TF | Details |
| R6204 | Cycle 9-17 | S6 Revision TF | Ratification Ballot - Line Item Revisions to SEMI S6-0707E Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment |
| 6309 | Cycle 1 or 2 -18 | Ergonomics TF | Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 5761C | Cycle 1 or 2 -18 | Energetic Materials TF | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes |
| 6310 | Cycle 9-17, 1 or 2 -18 | S28 Revision TF | Reapproval of SEMI S28-1011 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment |
| 5969A | Cycle 1 or 2 -18 | Fire Protection TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (pertaining to Fire) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
April 12, 2018 in conjunction with NA Spring Standards Meetings at SEMI HQ in Milpitas, California. Please check www.semi.org/standards under calendar for latest update.
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