SEMI International Standards
| Standards Locale: North America |
| Committee: Facilities & Gases |
| Place of Meeting: SEMI Headquarters, San Jose, CA |
| Date of Meeting: 11/08/2016 |
| Meeting End Date: 11/08/2016 |
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| Recording SEMI Standards Staff: Laura Nguyen |
| CER Posted to Web: 11/21/2016 |
Leadership Changes
Group | Previous Leader | New Leader |
| Gases Specification Task Force | Mohamed Saleem (Acting TF Leader), Matt Milburn (UCT) | Thomas Fritz (WIKA Instruments) |
| Pressure Measurement Task Force | Yanli Joyce Chen (UCT)
Jeff Christian (WIKA Instruments) | The Committee has moved this Task Force to Inactive Status. |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 5816B | Revision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site | Passed, Ratification Ballot to be issued |  5816BProceduralReview.pdf |
| 5964B | Line Item Revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers | |  5964BProceduralReview.pdf |
| Line Item 1 | Modifications to Section 5 | Passed, with editorial changes | |
| Line Item 2 | Change to Formula 1 | Passed, Superclean | |
| Line Item 3 | Change to Formula 2 | Passed, Superclean | |
| Line Item 4 | Change to Formula 5 | Passed, Superclean | |
| Line Item 5 | Change to Formula 6 | Passed, Superclean | |
| Line Item 6 | Change to Formula 8 | Passed, Superclean | |
| Line Item 7 | Change to Formula 16 | Passed, Superclean | |
| 5997A | Revision to SEMI C3-0413, Specifications for Gases | Passed, Ratification Ballot to be issued |  5997AProceduralReview.pdf |
| 6000A | Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon | Passed, as balloted |  6000AProceduralReview.pdf |
| 6002A | Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen | Passed, as balloted |  6002AProceduralReview.pdf |
| 6003A | Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O) | Passed, as balloted |  6003AProceduralReview.pdf |
| 6050 | Line Item Revision to Modify the Nonconforming Title for SEMI E16-0611, Guideline for Determining and Describing Mass Flow Controller Leak Rates | |  6050 ProceduralReview.pdf |
| Line Item 1 | Correct the title of SEMI E16 from “Guideline for Determining and Describing Mass Flow Controller Leak Rates” to “Guide for Determining and Describing Mass Flow Controller Leak Rates” | Passed, Superclean | |
| 6054 | Reapproval of SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow Controller | Failed, returned to the TF for rework and reballot | |
| 6055 | Reapproval of SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity | Failed, returned to the TF for rework and reballot | |
| 6056 | Reapproval of SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller | Failed, returned to the TF for rework and reballot | |
| 6057 | Reapproval of SEMI E29-1110, Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters | Passed, Superclean |  6057ProceduralReview.pdf |
| 6058 | Reapproval of SEMI E66-0611, Test Method for Determining Particle Contribution by Mass Flow Controllers | Passed, Superclean |  6058ProceduralReview.pdf |
| 6059 | Reapproval of SEMI F29-0997 (Reapproved 0611), Test Method for Purge Efficacy of Gas Source System Panels | Passed, Superclean |  6059ProceduralReview.pdf |
| 6060 | Reapproval of SEMI F70-0611, Test Method for Determination of Particle Contribution of Gas Delivery System | Passed, Superclean |  6060ProceduralReview.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 6054A | Revised SNARF | Mass Flow Controller TF | Line Item Revisions to SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow Controller – SNARF to be revised for Line Item changes |
| 6055A | Revised SNARF | Mass Flow Controller TF | Line Item Revisions to SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity – SNARF to be revised for Line Item changes |
| 6056A | Revised SNARF | Mass Flow Controller TF | Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with title change to Guide for Pressure Parameters of the Mass Flow Controller – SNARF to be revised, distributed for two-week TC member review followed by GCS and re-ballot for Cycle 1-17 |
| 6111 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F6-92, Guide for Secondary Containment of Hazardous Gas Piping Systems – Five-year Review |
| 6106 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F13-1101, Guide for Gas Source Control Equipment
– Five-year Review |
| 6107 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F14-93 (Reapproved 0699), Guide for the Design of Gas Source Equipment Enclosures – Five-year Review |
| 6108 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F20-0706E (Reapproved 0611), Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications – Five-year Review |
| 6110 | SNARF | NA Facilities Committee | Reapproval of SEMI F4-0211, Specification for Pneumatically Actuated Cylinder Valves – Five-year Review |
| 6109 | SNARF | NA Facilities Committee | Reapproval of SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves – Five-year Review |
| 6123 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F81-0611, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications – Five-year Review |
| 6122 | SNARF | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F78-0611, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications
– Five-year Review |
| 6125 | SNARF | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases – Five-year Review and to correct the nonconforming title |
| 6126 | SNARF | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F24-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Inert Specialty Gases –Five-year Review and to correct the nonconforming title |
| 6127 | SNARF | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F25-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Oxidant Specialty Gases – Five-year Review and to correct the nonconforming title |
| 6128 | SNARF | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F26-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Toxic Specialty Gases
– Five-year Review and to correct the nonconforming title |
| 6121 | SNARF | Mass Flow Controller TF | Reapproval of SEMI E67-1011, Test Method for Determining Reliability of Mass Flow Controller – Five-year Review |
| 6119 | SNARF | Mass Flow Controller TF | Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with title change to Test Method for Measurement of Mass Flow Controller Transient Characteristics – SNARF to be distributed for two-week TC member review followed by GCS and re-ballot for Cycle 1-16 |
| 6120 | SNARF | NA Facilities Committee | Reapproval of SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment – Five-year Review |
| 6140 | SNARF | Gases Specification TF | Reapproval of SEMI C3.2-0611, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality – Five-year Review |
| 6138 | SNARF | Gases Specification TF | Reapproval of SEMI C3.27-1102 (Reapproved 1011), Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality – Five-year Review |
| 6139 | SNARF | Gases Specification TF | Reapproval of SEMI C3.39-1011, Specification for Nitrogen Trifluoride (NF3), 99.98% – Five-year Review |
| 6143 | SNARF | Gases Specification TF | Reapproval of SEMI C3.40-1011, Specification for Carbon Tetrafluoride (CF4), 99.997% Quality – Five-year Review |
| 6141 | SNARF | Gases Specification TF | Reapproval of SEMI C3.47-1011, Specification for Hydrogen Bromide (HBr), 99.98% Quality – Five-year Review |
| 6142 | SNARF | Gases Specification TF | Reapproval of SEMI C3.55-1011, Specification for Silane (SiH4), Bulk, 99.994% Quality – Five-year Review |
| 6137 | SNARF | Gases Specification TF | Reapproval of SEMI C55-1104 (Reapproved 0211), Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality – Five-year Review |
| 6105 | SNARF | SEMI F51 Revision TF | Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology – SNARF was distributed for two-week TC member review followed by TC Chapter approval and will ballot for Cycle 1-17 or Cycle 2-17 |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| R5816B | Cycle 9, 2016 | Filters & Purifiers TF | Revision to SEMI F30-0710, Test Method for Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site |
| R5997A | Cycle 9, 2016 | Gases Specification TF | Revision to SEMI C3-0413, Specification for Gases |
| 6054A | Cycle 9, 2016 | Mass Flow Controller TF | Line Item Revisions to SEMI E18-0211, Guide for Temperature Specifications of the Mass Flow Controller |
| 6055A | Cycle 9, 2016 | Mass Flow Controller TF | Line Item Revisions to SEMI E27-0611, Guide for Mass Flow Controller and Mass Flow Meter Linearity |
| 6056A | Cycle 1, 2017 | Mass Flow Controller TF | Revision to SEMI E28-1110, Guide for Pressure Specifications of the Mass Flow Controller with title change to Guide for Pressure Parameters of the Mass Flow Controller |
| 6111 | Cycle 9, 2016 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F6-92, Guide for Secondary Containment of Hazardous Gas Piping Systems |
| 6106 | Cycle 9, 2016 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F13-1101, Guide for Gas Source Control Equipment |
| 6107 | Cycle 9, 2016 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F14-93 (Reapproved 0699), Guide for the Design of Gas Source Equipment Enclosures |
| 6108 | Cycle 9, 2016 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F20-0706E (Reapproved 0611), Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications |
| 6110 | Cycle 9, 2016 | NA Facilities Committee | Reapproval of SEMI F4-0211, Specification for Pneumatically Actuated Cylinder Valves |
| 6109 | Cycle 9, 2016 | NA Facilities Committee | Reapproval of SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves |
| 6123 | Cycle 9, 2016 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F81-0611, Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications |
| 6122 | Cycle 9, 2016 | Materials of Construction of Gas Delivery Systems TF | Reapproval of SEMI F78-0611, Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications |
| 6125 | Cycle 1, 2017 | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F23-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Flammable Specialty Gases |
| 6126 | Cycle 1, 2017 | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F24-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Inert Specialty Gases |
| 6127 | Cycle 1, 2017 | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F25-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Oxidant Specialty Gases |
| 6128 | Cycle 1, 2017 | Gases Specification TF | Line Item Revision to Correct Nonconforming Title of SEMI F26-0697 (Reapproved 0712), Particle Specification for Grade 10/0.2 Toxic Specialty Gases |
| 6121 | Cycle 1, 2017 | Mass Flow Controller TF | Reapproval of SEMI E67-1011, Test Method for Determining Reliability of Mass Flow Controller |
| 6119 | Cycle 1, 2017 | Mass Flow Controller TF | Revision to SEMI E17-1011, Guide for Mass Flow Controller Transient Characteristics Tests with title change to Test Method for Measurement of Mass Flow Controller Transient Characteristics |
| 6120 | Cycle 1, 2017 | NA Facilities Committee | Reapproval of SEMI E137-0705 (Reapproved 1111), Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment |
| 6140 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C3.2-0611, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality |
| 6138 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C3.27-1102 (Reapproved 1011), Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality |
| 6139 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C3.39-1011, Specification for Nitrogen Trifluoride (NF3), 99.98% |
| 6143 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C3.40-1011, Specification for Carbon Tetrafluoride (CF4), 99.997% Quality |
| 6141 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C3.47-1011, Specification for Hydrogen Bromide (HBr), 99.98% Quality |
| 6142 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C3.55-1011, Specification for Silane (SiH4), Bulk, 99.994% Quality |
| 6137 | Cycle 2, 2017 | Gases Specification TF | Reapproval of SEMI C55-1104 (Reapproved 0211), Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality |
| 6105 | Cycle 1 or 2, 2017 | SEMI F51 Revision TF | Revision to SEMI F51-1115, Guide for Elastometric Sealing Technology |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Sent to Inactive Status:
SEMI F27-0997 (Reapproved 0611), Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
Special Announcements of the Committee (Workshops, Programs, etc.)
New Google site for collaboration, resources and important information for the NA Facilities & Gases Task forces and Committee. To edit or post, please email Laura Nguyen, lnguyen@semi.org, SEMI Staff, to be added.https://sites.google.com/a/semi.org/fg/
Next Meeting
https://sites.google.com/a/semi.org/fg/The next meeting of the Facilities & Gases NA TC Chapter committee is scheduled for Tuesday, April 4, 2017 at the NA Standards Spring 2017 Meetings at SEMI Headquarters.
For more information, please visit: http://www.semi.org/en/standards
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