SEMI International Standards
Standards Locale: Europe |
Committee: Gases & Liquid Chemicals |
Place of Meeting: Dresden, Germany |
Date of Meeting: 10/07/2015 |
Meeting End Date: 10/07/2015 |
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Recording SEMI Standards Staff: James Amano |
CER Posted to Web: 10/15/2015 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5495 | Guide for CycloHexanone | Passed with technical change, ratification ballot required | |
5656A | Revision to SEMI C65-0308 : Guide for Trimethylsilane (3MS) | Failed | |
5657A | Revision to SEMI C66-0308: Guide for Trimethylaluminium (TMAl) | Failed | |
5658A | New Standard: Guide for Pentakis(Dimethylamino) Tantalum (PDMAT) | Passed with technical change, ratification ballot required | |
5765 | Revision to SEMI C15 : Test Method for ppm and ppb humidity standards | Passed with technical change, ratification ballot required | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
During the three-year SNARF review, the five SNARFs below were abolished by the committee.
# | Type | SC/TF/WG | Details |
5325 | SNARF | Precursor Specifications Task Force | New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS) |
5327 | SNARF | Precursor Specifications Task Force | New Standard: Guide for Monomethyl Silane |
5491 | SNARF | Precursor Specifications Task Force | New Standard: Guide for Titanium Tetrachloride (TiCl4) |
5493 | SNARF | Precursor Specifications Task Force | New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS) |
5494 | SNARF | Precursor Specifications Task Force | New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) |
Authorized Ballots
# | When | SC/TF/WG | Details |
5656B | 2016 | Precursor Specifications Task Force | Revision to SEMI C65-0308 : Guide for Trimethylsilane (3MS) |
5657B | 2016 | Precursor Specifications Task Force | Revision to SEMI C66-0308: Guide for Trimethylaluminium (TMAl) |
SEMI C72-0811 | 2016 | | Reapproval Ballot: Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA |
SEMI C67-0811 | 2016 | | Reapproval Ballot: Guide for Hafnium Amides |
SEMI C68-0811 | 2016 | | Reapproval Ballot: Guide for Zirconium Amides |
SEMI C73-0811 | 2016 | | Reapproval Ballot: Guide for Hafnium Chloride |
SEMI C74-0811 | 2016 | | Reapproval Ballot: Guide for Hafnium Tert-Butoxide |
SEMI C75-0811 | 2016 | | Reapproval Ballot: Guide for Tetrakis(Dimethylamino)Titanium |
SEMI C76-0811 | 2016 | | Reapproval Ballot: Guide for Zirconium Tert-Butoxide |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
None.
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