SEMI International Standards
Standards Locale: Europe
Committee: Gases & Liquid Chemicals
Place of Meeting: Dresden, Germany
Date of Meeting: 10/07/2015
Meeting End Date: 10/07/2015
Recording SEMI Standards Staff: James Amano
CER Posted to Web: 10/15/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5495
Guide for CycloHexanonePassed with technical change, ratification ballot required
5656A
Revision to SEMI C65-0308 : Guide for Trimethylsilane (3MS)Failed
5657A
Revision to SEMI C66-0308: Guide for Trimethylaluminium (TMAl)Failed
5658A
New Standard: Guide for Pentakis(Dimethylamino) Tantalum (PDMAT)Passed with technical change, ratification ballot required
5765
Revision to SEMI C15 : Test Method for ppm and ppb humidity standardsPassed with technical change, ratification ballot required



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
During the three-year SNARF review, the five SNARFs below were abolished by the committee.
#
Type
SC/TF/WG
Details
5325
SNARF
Precursor Specifications Task Force
New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS)
5327
SNARF
Precursor Specifications Task Force
New Standard: Guide for Monomethyl Silane
5491
SNARF
Precursor Specifications Task Force
New Standard: Guide for Titanium Tetrachloride (TiCl4)
5493
SNARF
Precursor Specifications Task Force
New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS)
5494
SNARF
Precursor Specifications Task Force
New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS)


Authorized Ballots

#
When
SC/TF/WG
Details
5656B
2016
Precursor Specifications Task Force
Revision to SEMI C65-0308 : Guide for Trimethylsilane (3MS)
5657B
2016
Precursor Specifications Task Force
Revision to SEMI C66-0308: Guide for Trimethylaluminium (TMAl)
SEMI C72-0811
2016
Reapproval Ballot: Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA
SEMI C67-0811
2016
Reapproval Ballot: Guide for Hafnium Amides
SEMI C68-0811
2016
Reapproval Ballot: Guide for Zirconium Amides
SEMI C73-0811
2016
Reapproval Ballot: Guide for Hafnium Chloride
SEMI C74-0811
2016
Reapproval Ballot: Guide for Hafnium Tert-Butoxide
SEMI C75-0811
2016
Reapproval Ballot: Guide for Tetrakis(Dimethylamino)Titanium
SEMI C76-0811
2016
Reapproval Ballot: Guide for Zirconium Tert-Butoxide


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
None.