SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: SEMI HQ, San Jose, California
Date of Meeting: 11/09/2016
Meeting End Date: 11/09/2016
Recording SEMI Standards Staff: Inna Skvortsova
CER Posted to Web: 11/22/2016


Leadership Changes

Group
Previous Leader
New Leader/Change
Equipment Training and Documentation TF
None
Task Force disbanded.


Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
Task Force
Details
TBDSNARFEquipment COOLine-Item Revision to SEMI E35, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
New SNARF for 2-week review and GCS approval
TBDSNARFEquipment COOLine-Item Revision to SEMI E140, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
New SNARF for 2-week review and GCS approval
TBDSNARF Equipment COOLine-Item Revision to E35, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and E140, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems New SNARF for 2-week review and GCS approval
TBDSNARFESD/ESCReapproval for E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated Areas
New SNARF
TBDSNARFTBDReapproval/revision to E113-0512, Specification for Semiconductor Processing Equipment RF Power Delivery Systems
New SNARF based on SCIS feedback
TBDSNARFTBDReapproval/revision to E135-0512R, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
New SNARF based on SCIS feedback


Authorized Ballots

#
When
Task Force
Details
5596Cycle 1-2017EMCNew Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
TBDCycle 1-2017 ESD/ESCReapproval for E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated Areas


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
SCIS Report presented by Paul Trio (SEMI) calling for collaboration on RF-related documents, including standards due for 5-year review:

- E113-0512, Specification for Semiconductor Processing Equipment RF Power Delivery Systems
- E135-0512R, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
    Next SCIS RF Working Group meeting is scheduled for December 2016 at Intel, Santa Clara. Please contact ptrio@semi.org for details.

    Paul Trio will share TFOF and SNARFs proposals from SCIS with SEMI Standards Metrics TC Chairs.


    Next Meeting

    Tuesday, April 4 (Tentative)

          · ESD/ESC TF (13:30 – 15:30)

          · Equipment COO (15:30 – 16:30)

          · EMC Task Force (17:00 – 19:00)

    Wednesday, April 5 (Tentative)
          · Equipment RAMP Metrics TF (9:00 – 11:00)

          · Metrics NA TC Chapter (14:00 – 17:00)