SEMI International Standards
Standards Locale: North America |
Committee: Metrics |
Place of Meeting: SEMI HQ, San Jose, California |
Date of Meeting: 11/09/2016 |
Meeting End Date: 11/09/2016 |
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Recording SEMI Standards Staff: Inna Skvortsova |
CER Posted to Web: 11/22/2016 |
Leadership Changes
Group | Previous Leader | New Leader/Change |
Equipment Training and Documentation TF | None | Task Force disbanded. |
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | Task Force | Details |
TBD | SNARF | Equipment COO | Line-Item Revision to SEMI E35, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
New SNARF for 2-week review and GCS approval |
TBD | SNARF | Equipment COO | Line-Item Revision to SEMI E140, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
New SNARF for 2-week review and GCS approval |
TBD | SNARF | Equipment COO | Line-Item Revision to E35, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and E140, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems New SNARF for 2-week review and GCS approval |
TBD | SNARF | ESD/ESC | Reapproval for E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated Areas
New SNARF |
TBD | SNARF | TBD | Reapproval/revision to E113-0512, Specification for Semiconductor Processing Equipment RF Power Delivery Systems
New SNARF based on SCIS feedback |
TBD | SNARF | TBD | Reapproval/revision to E135-0512R, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
New SNARF based on SCIS feedback |
Authorized Ballots
# | When | Task Force | Details |
5596 | Cycle 1-2017 | EMC | New Standard: Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment |
TBD | Cycle 1-2017 | ESD/ESC | Reapproval for E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items within Specially Designated Areas |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SCIS Report presented by Paul Trio (SEMI) calling for collaboration on RF-related documents, including standards due for 5-year review:
- E113-0512, Specification for Semiconductor Processing Equipment RF Power Delivery Systems
- E135-0512R, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
Next SCIS RF Working Group meeting is scheduled for December 2016 at Intel, Santa Clara. Please contact ptrio@semi.org for details.
Paul Trio will share TFOF and SNARFs proposals from SCIS with SEMI Standards Metrics TC Chairs.
Next Meeting
Tuesday, April 4 (Tentative)
Wednesday, April 5 (Tentative)
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