SEMI International Standards
Standards Locale: Japan
Committee: Silicon Wafer
Place of Meeting: Tokyo, Japan
Date of Meeting: 09/18/2015
Meeting End Date: 09/18/2015
Recording SEMI Standards Staff: Junko Collins
CER Posted to Web: 10/02/2015


Leadership Changes




Committee Structure Changes
None.

Ballot Results


Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5877Revision to SEMI M80-0514, Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers with title change to: Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers Passed as balloted
Superclean
5877_Ballot report on Sep. 18_R0.1.pdf5877_Ballot report on Sep. 18_R0.1.pdf



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities


#
Type
SC/TF/WG
Details
5770SNARFInternational Test Method TFTest Methods for Bulk micro defect density and denuded zone width in annealed silicon wafers. ⇒ Guide for measuring bulk micro defect density and denuded zone width in annealed silicon wafers.

Note: 2 weeks Global TC members' review process was done before this meeting.
TBDSNARFInternational Test Method TFTEST METHOD FOR RECOMBINATION LIFETIME OF THE EPILAYER OF THE SILICON EPITAXIAL WAFER (p/p+, n/n+) BY THE SHORT WAVELENGTH EXCITAION MICROWAVE PHOTOCONDUCTIVE DECAY METHOD”

Note: 2 weeks Global TC members' review process was done before this meeting.
5774SNARFInternational Test Method TFRevision of the SNARF with Title change, Test Method for Sample Preparation Methods for Minority Carrier Diffusion Length Measurements in Silicon Wafers by Surface Photovoltage Methods
Guide for Sample Preparation Methods for Minority Carrier Diffusion Length Measurements in Silicon Wafers by Surface Photovoltage Methods

Note: 2 weeks Global TC members' review process will be needed.
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF


Authorized Ballots

#
When
SC/TF/WG
Details
5770Cycle 8Test Methods for Bulk micro defect density and denuded zone width in annealed silicon wafers. ⇒ Guide for measuring bulk micro defect density and denuded zone width in annealed silicon wafers.
SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
December 17, Thursday, 2015 in conjunction with SEMICON Japan 2015, 09:00-17:00 at the meeting room in Conference Tower, Tokyo Big Sight.