SEMI International Standards
Standards Locale: North America
Committee: Gases
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 03/31/2015
Meeting End Date: 03/31/2015
Recording SEMI Standards Staff: Michael Tran
CER Posted to Web: 04/23/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
5671BRevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% QualityFailed TC chapter review and returned to the TF for rework
5673BRevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% QualityFailed TC chapter review and returned to the TF for rework
5721ALine item revision to SEMI C71-0611, Specification and Guide for Boron Trichloride (BCI3) with title change to: Specification for Boron Trichloride (BCI3)5721AProceduralReview.doc5721AProceduralReview.doc
Line item 1Clarify the Ratio the Sample Solution is being DilutedPassed TC Chapter review as balloted
5811Reapproval of SEMI C3.35-1109E - Specification for Hydrogen Chloride (HCI), 99.997% QualityPassed TC Chapter review5811ProceduralReview.doc5811ProceduralReview.doc
5812Reapproval of SEMI C3.6-0710 - Specification for Phosphine (PH3) in Cylinders, 99.98% QualityPassed TC Chapter review as balloted5812ProceduralReview.doc5812ProceduralReview.doc
5722ALine item revision to SEMI E56-0314, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers5722AProceduralReview.doc5722AProceduralReview.doc
Line item 1Revise definitions of Drift, Long Term and Drift, Short TermPassed TC Chapter review as balloted
Line item 2Corrections to Equation 5Passed TC Chapter review as balloted
5813Reapproval of SEMI E77-1104 (Reapproved 0710) - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate GasesPassed TC Chapter review 5813ProceduralReview.doc5813ProceduralReview.doc
5814Reapproval of SEMI E80-0299 (Reapproved 0710) - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)Passed TC Chapter review with editorial changes5814ProceduralReview.doc5814ProceduralReview.doc
5595New Standard: Guide for the Development of Dimensional Standards for “Sandwich” Surface Mount ComponentsPassed TC Chapter review with editorial changes5595ProceduralReview.doc5595ProceduralReview.doc
5667Revision to SEMI F112-0613, Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)Failed TC chapter review and returned to the TF for rework
5815Reapproval of SEMI F28-1103 (Reapproved 0710) - Test Method for Measuring Particle Generation from Process PanelsPassed TC Chapter review as balloted5815ProceduralReview.doc5815ProceduralReview.doc
5816Reapproval of SEMI F30-0710 - Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation SitePassed TC Chapter review as balloted5816ProceduralReview.doc5816ProceduralReview.doc
5714ARevision of SEMI F19-0304 (Reapproved 0310), Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel ComponentsPassed TC Chapter review with editorial changes5714AProceduralReview.doc5714AProceduralReview.doc
5715ARevision of SEMI F77-0703 (Reapproved 0310), Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas SystemsPassed TC Chapter review as balloted5715AProceduralReview.doc5715AProceduralReview.doc



Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the TC Chapter:
#
Type
SC/TF/WG
Details
5876SNARFMaterials of Construction of Gas Delivery Systems TFNew Standard: Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF



Authorized Ballots
Listing of documents approved by the committee for letter ballot.
#
When
SC/TF/WG
Details
5667ACycle 5, 2015Filters and Purifiers TFNew Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components
5671CCycle 5, 2015Gas Specifications TFRevision of SEMI C3.12-1109, Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
5673CCycle 5, 2015Gas Specifications TFRevision of SEMI C3.34-1109, Specification for Disilane (Si2H6) in Cylinders, 97% Quality
5876Cycle 5, 2015Materials of Construction of Gas Delivery Systems TFNew Standard: Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution

(Pending GCS Approval)


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
SEMICON West 2015
July 14-16, 2015
Moscone Center, San Francisco
Register Today!


Next Meeting
The next N.A. Gases standards meetings are tentatively scheduled for July 13-14, 2015 at the San Francisco Marriott Marquis Hotel in San Francisco, California in conjunction with the NA Standards Meetings at SEMICON West 2015. Exact meeting dates and details will be announced when finalized and will be available at the SEMI Standards Calendar of Events: http://www.semi.org/en/Standards/CalendarEvents

Tentative Schedule:

Monday, July 13*
Gases TFs
– Materials of Construction of Gas Delivery Systems TF (8:00 to 9:30)
– Filters and Purifiers TF (9:30 to 11:00)
– Mass Flow TF (11:00 to 12:00)
– Gas Specifications TF (13:00 to 14:00)
– Surface Mount Sandwich Component Dimensions TF (14:00 to 15:00)
– Pressure Measurement TF (15:00 to 17:00)

Tuesday, July 14*
– Joint Facilities & Gases TC Chapters (9:00 to 12:00)

*All times are in Pacific Time. Times and dates are subject to change without notice.