SEMI International Standards
Standards Locale: Japan |
Committee: Facilities |
Place of Meeting: SEMI Japan office, Tokyo |
Date of Meeting: 06/23/2017 |
Meeting End Date: 06/23/2017 |
|
Recording SEMI Standards Staff: Mizue Iwamura |
CER Posted to Web: 07/06/2017 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
Standard Designation | Title |
SEMI F1-0812 | Specification for Leak Integrity of High-Purity Gas Piping Systems and Components |
SEMI F106-1012 | TEST METHOD FOR DETERMINATION OF LEAK INTEGRITY OF GAS DELIVERY SYSTEMS BY HELIUM LEAK DETECTOR |
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting will be held as follows:
Date: Tuesday, December 12
Time: 13:00-15:00
Location: SEMI Japan office.
Copyright ©2024 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.