SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: San Francisco Marriott Marquis Hotel in San Francisco, California
Date of Meeting: 07/13/2015
Meeting End Date: 07/13/2015
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 07/22/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5870
Line item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance
Line Item 1
Correct the Title of SEMI MS4 from “Standard Test Method” to “Test Method”Failed to reach the 60% return rate, will be reballoted


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

#
When
SC/TF/WG
Details
5870ACycle 6, 2015NA MEMS/NEMS 5-Year Review TFLine item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
SEMI MS7 to Inactive Status
At the North America (NA) Standards Meetings at SEMICON West 2015, the NA MEMS / NEMS Technical Committee Chapter agreed to allow SEMI MS7 (Specification for Microfluidic Interfaces to Electronic Device Packages) to go into Inactive Status.

Note: Per section 4.2.19 of the SEMI Standards Regulations, Inactive Status is used to describe a Standard or Safety Guideline that is not currently supported by the global technical committee. Inactive Standards and Inactive Safety Guidelines are still available from SEMI. Inactive Standards and Inactive Safety Guidelines contain an ‘Inactive’ watermark, but will still be available in the ‘Current Standards’ section of the SEMI Web site.

Next Meeting
NA Standards Fall 2015 Meetings
November 2-5, 2015
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
U.S.A.

Monday, November 2
- Microfluidics TF (1:30 PM to 2:30 PM)
- NA MEMS / NEMS TC Chapter (2:30 PM to 4:30 PM)

For more information, please visit: http://www.semi.org/standards