SEMI International Standards
Standards Locale: North America
Committee: MEMS / NEMS
Place of Meeting: San Jose, CA
Date of Meeting: 11/02/2015
Meeting End Date: 11/02/2015
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/04/2015


Leadership Changes

Group
Previous Leader
New Leader
Materials Characterization Task ForceRich Allen/NIST
.

Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
5870ALine item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in ResonancePassed5870AProceduralReview.docx5870AProceduralReview.docx
.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
TFMaterials CharacterizationProcesses added to Charter and Scope
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
None.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
MS6: Guide for Design and Materials for Interfacing Microfluidic Systems to go inactive.

Next Meeting
NA Spring Meeting 2016
Monday, April 4, 2016
For more information, please visit: http://www.semi.org/standards