SEMI International Standards
Standards Locale: North America |
Committee: MEMS / NEMS |
Place of Meeting: San Jose, CA |
Date of Meeting: 11/02/2015 |
Meeting End Date: 11/02/2015 |
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Recording SEMI Standards Staff: Laura Nguyen |
CER Posted to Web: 11/04/2015 |
Leadership Changes
Group | Previous Leader | New Leader |
Materials Characterization Task Force | | Rich Allen/NIST |
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Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5870A | Line item revision to SEMI MS4-1113, Standard Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance with title change to: Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance | Passed | 5870AProceduralReview.docx |
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Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| TF | Materials Characterization | Processes added to Charter and Scope |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
MS6: Guide for Design and Materials for Interfacing Microfluidic Systems to go inactive.
Next Meeting
NA Spring Meeting 2016
Monday, April 4, 2016
For more information, please visit: http://www.semi.org/standards
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