SEMI International Standards
Standards Locale: Japan |
Committee: Physical Interfaces & Carriers |
Place of Meeting: Makuhari Messe, Chiba, Japan |
Date of Meeting: 12/06/2013 |
Meeting End Date: 12/06/2013 |
|
Recording SEMI Standards Staff: Hirofumi Kanno |
CER Posted to Web: 12/11/2013 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
5626 | SNARF | 450 mm International PIC TF and International Process Module Physical Interface TF (IPPI TF) | Revision to SEMI E154-0713: Mechanical Interface Specification for 450 mm Load Port and SEMI E166-0513: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard for Addition of EFEM Pocket
(Note: The initial SNARF was approved in July, 2013.) |
5690 | SNARF | 450 mm International PIC TF | Revision to SEMI AUX023-1113, Overview Guide to SEMI Standards for 450 mm Wafers |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
5626 | Cycle 1-2014 | 450 mm International PIC TF and International Process Module Physical Interface TF (IPPI TF) | Revision to SEMI E154-0713: Mechanical Interface Specification for 450 mm Load Port and SEMI E166-0513: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard for Addition of EFEM Pocket |
5524 | Cycle 2-2014 | 450 mm AMHS TF | Revisions to SEMI E156-0710, Mechanical Specification for 450 mm AMHS Stocker to Transport Interface, with title change to Mechanical Interface Specification for 450 mm AMHS Stocker to Transport Equipment |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
The Standards seminar for 450 mm Transition Status with SEMI Standardization View was held on December 6, 2013 at Makuhari Messe, Chiba, Japan.
Next Meeting
The next Japan PI&C committee meeting is scheduled on April 18, 2014 (13:00-17:30) at SEMI Japan Office, Tokyo, Japan.
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