SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 04/03/2013
Meeting End Date: 04/03/2013
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 04/11/2013
Leadership Changes
Group | Previous Leader | New Leader |
| NA I&C Committee | David Bricker (Applied Materials) stepped down as committee co-chair. | Brian Rubow (Cimetrix) was appointed as committee co-chair.
(To be formally appointed by the North America Regional Standards Committee [NARSC] at SEMICON West 2013) |
| Energy Saving Equipment Communication (ESEC) Task Force | Dan Chlus (IBM/SEMATECH) stepped down as TF co-leader. | Gino Crispieri (ISMI) was appointed as TF co-leader. |
| GEM300 Task Force | David Bricker (Applied Materials) stepped down as TF co-leader. | Gino Crispieri (ISMI) was appointed as TF co-leader. |
TC Chapter Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
 | * * * Cycle 1, 2013 Voting Period * * * | | |
5511 | Reapproval of SEMI E54.20, Standard for Sensor/Actuator Network Communications for EtherCAT | Passed as balloted. Superclean |  |
| * * * Cycle 2, 2013 Voting Period * * * | | |
5274A | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0710, Sensor/Actuator Network Standard | Failed, to be reballoted |  |
5411A | New Standard: Specification for Equipment Energy Saving Mode Communications (EESM) | Failed, to be reballoted |  |
5452A | Line Item Revisions to SEMI E134-0710, Specification for Data Collection Management and SEMI E134.1-0710, Specification for SOAP Binding of Data Collection Management (DCM) | |  |
Line Item 1 | Clarify conditionValue for Start Triggers and Stop Triggers | Passed as balloted. | |
Line Item 2 | Clarify InvalidExceptionRequest for an isDuplicate special case | Passed with editorial changes. | |
5453 | Revision to Add a New Subordinate Standard: Specification for SECS-II Protocol for Equipment Energy Saving Mode to SEMI Draft Document 5411A, New Standard: Specification for Equipment Energy Saving Mode Communications (EESM) | Failed, to be reballoted |  |
5454A | Line Item Revisions to SEMI E30-0611, Generic Equipment Model (GEM) Standard and SEMI E5-0712, SEMI Equipment Communications Standard 2 Message Content (SECS-II) | |  |
Line Item 1 | Modifications to the Definition of Alarms and Alarm Category Definitions | Failed, to be reballoted | |
5509 | Line Item Revision to SEMI E94-0312, Specification for Control Job Management | |  |
Line Item 1 | Clarify the entry for OutputRule in Table 2 | Failed, to be reballoted | |
5510 | Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking. Modifications to sections in the standard to clarify its content | |  |
Line Item 1 | Pre- and Post-processing Requirement | Failed, to be reballoted | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5507 | Revised SNARF | Diagnostic Data Acquisition (DDA) TF | Revisions to:
- SEMI E120, Specification for the Common Equipment Model (CEM),
- SEMI E120.1, XML Schema for the Common Equipment Model (CEM),
- SEMI E125, Specification for Equipment Self Description (EqSD),
- SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EQSD),
- SEMI E128, Specification for XML Message Structures,
- SEMI E132, Specification for Equipment Client Authentication and Authorization
- SEMI E132.1, Specification for SOAP Binding for Equipment Client Authentication and Authorization (ECA),
- SEMI E134, Specification for Data Collection Management
- SEMI E134.1, Specification for SOAP Binding of Data Collection Management (DCM),
- SEMI E138, XML Semiconductor Common Components
- SEMI E145, Classification for Measurement Unit Symbols in XML
- SEMI E164, Specification for EDA Common Metadata
SNARF revisions made to include clarifications to exception criteria in E134. Also, changes to recognize Complementary Files and Various Materials will be made. |
5589 | SNARF | GEM300 TF | Revisions to:
- SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM),
- SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM),
- SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM),
- SEMI E88, Specification for AMHS Storage SEM (Stocker SEM),
- SEMI E91, Specification for Prober Specific Equipment Model (PSEM),
- SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM), &
- SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM) |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5274B | Cycle 3, 2013
(or C4-13) | Sensor Bus TF | New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON) |
| 5411B | Cycle 3, 2013
(or C4-13) | Energy Saving Equipment Communication TF | New Standard: Specification for Equipment Energy Saving Mode Communications (EESM) |
| 5453A | Cycle 3, 2013
(or C4-13) | Energy Saving Equipment Communication TF | New Standard: Specification for SECS-II Protocol for Equipment Energy Saving Mode Communications
Note: This activity will result in a subordinate standard under the “Specification for Equipment Energy Saving Mode Communications” (SNARF #5411B) |
| 5454B | Cycle 3, 2013
(or C4-13) | GEM300 TF | Line Item Revisions to SEMI E30, Generic Equipment Model (GEM) Standard and SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
| 5509A | Cycle 4, 2013 | GEM300 TF | Revision to SEMI E94, Specification for Control Job Management |
| 5510A | Cycle 4, 2013 | GEM300 TF | Revision to SEMI E157, Specification for Module Process Tracking |
| 5589 | Cycle 4, 2013 | GEM300 TF | Revisions to:
- SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM),
- SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM),
- SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM),
- SEMI E88, Specification for AMHS Storage SEM (Stocker SEM),
- SEMI E91, Specification for Prober Specific Equipment Model (PSEM),
- SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM), &
- SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM) |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
North America Standards Meetings at SEMICON West 2013
July 8-11, 2013
San Francisco Marriott Marquis Hotel
55 Fourth Street
San Francisco, California 94103
Monday, July 8
- I&C Leadership (9:00 AM – 10:00 AM)
- GEM300 Task Force (10:00 AM – 5:00 PM)
- Process Control Systems [PCS] Task Force (1:00 PM – 3:00 PM)
- I&C Global Coordinating Subcommittee [GCS] (5:00 PM to 6:00 PM)
Tuesday, July 9
- Diagnostic Data Acquisition [DDA] Task Force (8:00 AM – 12:00 Noon)
- Sensor Bus Task Force (1:00 PM – 3:00 PM)
- Discussion on Japan EISS TF Activity (1:00 PM – 3:00 PM)
- Energy Saving Equipment Communication [ESEC] Task Force (3:00 PM – 6:00 PM)
- Sort Map Task Force (3:00 PM to 5:00 PM)
Wednesday, July 10
- I&C Committee (8:00 AM – 4:30 PM)
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