SEMI International Standards
Standards Locale: North America
Committee: Metrics
Place of Meeting: San Jose, CA
Date of Meeting: 11/04/2015
Meeting End Date: 11/04/2015
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/11/2015


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

#
When
SC/TF/WG
Details
5819ACycle 1 or 2, 2016NA Metrics TC ChapterReapproval of SEMI E114-0302E (Reapproved 0309) - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery System
5820ACycle 1 or 2, 2016NA Metrics TC ChapterReapproval of SEMI E115-0302E (Reapproved 0309) - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems
.

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
NA Spring Meeting 2016
For more information, please visit: http://www.semi.org/standards