SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: San Francisco Marriott Marquis, California
Date of Meeting: 07/15/2016
Meeting End Date: 07/15/2016
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 07/20/2016


Leadership Changes

Group
Previous Leader
New Leader
Flow Limitation TF was disbanded
Committee Structure Changes
None.

Ballot Results

Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
4683ILine Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure
Line Item 1 – Delayed Revisions Related to Chemical Exposure CriteriaFailed and returned to TF for rework and reballot4683I-LI1 Compiled Responses_jbv-071216.pdf4683I-LI1 Compiled Responses_jbv-071216.pdf
5761ANew Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing ProcessesFailed and returned to TF for rework and reballot5761A Compiled Responses.pdf5761A Compiled Responses.pdf
5917Line Item Revisions to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Addition of reference to a manual material-handling guide in SEMI-S8, Appendix 2, Lifting, Strength, and Materials Handling5917_Procedural Review.pdf5917_Procedural Review.pdf
Line Item 1 – Add a Definition for “hand-object coupling point” in the Terminology SectionPassed superclean
Line Item 2 – Add a reference to SEMATECH ISMI Manual Material Handling Application GuidePassed superclean
Line Item 3 – Revisions and additions to hand/arm clearancesFailed and returned to TF for rework and reballot
Line Item 4 – Add a new Related Information section to assist with determining what tasks are within the scope of an assessment to SEMI S8Failed and returned to TF for rework and reballot
5970ALine Item Revisions to SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment5970ProceduralReviewRev1.pdf5970ProceduralReviewRev1.pdf
Line Item 1 - Changes to Terminology to Align with SEMI S10. Passed as balloted


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
6049SNARFS10 Revision Task ForceLine-Item Revision to SEMI S10-0815E Safety Guideline for Risk Assessment and Risk Evaluation Process
(New SNARF)
4683SNARFS2 Chemical Exposure Task ForceLine Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure
(granted a one year extension)
4975SNARFS6 Revision Task ForceLine Item Revision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
(granted a one year extension)
5624SNARFS2 Chemical Exposure Task ForceRevision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Changes related to representative sampling
(granted a one year extension)
5623SNARFS1 Revision Task ForceRevision to SEMI S1, Safety Guideline for Equipment Safety Labels
(SNARF was abolished)
5625SNARFS2 Non-Ionizing Radiation Task ForceLine Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation
(SNARF was abolished)


Authorized Ballots

#
When
SC/TF/WG
Details
4683ICycle 7-16S2 Chemical Exposure Task ForceLine Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure
5761BCycle 7-16Energetic Materials EHS Task ForceNew Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
5917ACycle 7-16Ergonomics Task ForceLine Item Revisions to SEMI S8, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Addition of reference to a manual material-handling guide in SEMI-S8, Appendix 2, Lifting, Strength, and Materials Handling
4975Cycle 7-16S6 Revision Task ForceLine Item Revision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
November 10, 2017 (9am-6 PM PDT) San Jose, California in conjunction with the NA Fall Standards meetings. Check www.semi.org/en/standards for details.