SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 11/06/2014 |
| Meeting End Date: 11/06/2014 |
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| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: 11/24/2014 |
Leadership Changes
Group | Previous Leader | New Leader |
| Global S23 Task Force | | Lauren Crane (KLA-Tencor) was appointed as global TF co-leader. |
| The S2 to Machinery Directive Mapping Task Force has been disbanded. | Lauren Crane (KLA-Tencor) stepped down as TF leader. | |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 5, 2014 Ballots | | |
5623 | Line Item Revisions to SEMI S1-0708E, Safety Guideline for Equipment Safety Labels | |  5623ProceduralReview ALL.docx |
Line Item 1 | Clarifying the Purpose Statement in Section 1.1 | Passed as balloted | |
Line Item 2 | Adding “NOTICE” to Note 4 of the Scope Section | Passed as balloted | |
Line Item 3 | Revising Related Information 1 – Letter Height of Text in Message Panel | Failed | |
Line Item 4 | Adding Test Method for Determining “Durability” | Failed | |
Line Item 5 | Addition of NOTICE to Allow for Italics or Non-italicized Letters | Passed as balloted | |
Line Item 6 | Changing Reference to Appendix 1 from Within Note 12 to a New Section 9.6 | Failed | |
Line Item 7 | Adding Tolerance to the Nominal Dimensions for Surround Shapes in Section 9.10 | Passed as balloted | |
Line Item 8 | Adding New Symbol and Updating Sources in Appendix 1 | Failed | |
Line Item 9 | Correcting the Arabic and Farsi Translations in Table A2-1 | Passed with editorial changes | |
5760 | Line Item Revisions to SEMI S7-0310, Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications | |  5760ProceduralReview.docx |
Line Item 1 | Change to make qualifications statement available when work starts | Passed with editorial changes | |
Line Item 2 | Add document retention criteria | Passed as balloted | |
| Cycle 6, 2014 Ballots | | |
4683D | Line Item Revisions to SEMI S2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure | |  4683DProceduralReview ALL.docx |
Line Item 1 | Add explanatory materials for valid air sampling and measurement methods and accredited laboratories | Failed, to be reballoted | |
Line Item 2 | Clarify the reporting criteria | Passed with editorial changes | |
5591A | Line Item Revisions to SEMI S2-0712b, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed revisions related to fire protection | |  5591AProceduralReview.docx |
Line Item 1 | Audibility and visibility of annunciators of fire detection systems | Passed with editorial changes | |
Line Item 2 | Audibility and visibility of annunciators of fire suppression systems | Passed with editorial changes | |
5718A | Line Item Revisions to SEMI S10-0307E, Safety Guideline for Risk Assessment and Risk Evaluation Process | |  5718AProceduralReview ALL.docx |
Line Item 1 | Modify Note 3 and 4 in definitions section | Passed as balloted | |
Line Item 2 | Clarification section 6.5 on risk estimation, remove the term benchmarking. Multiple changes in the section | Failed, to be reballoted | |
Line Item 3 | Update standards (remove years and add note to latest version). Line item 3 is to bring standards references in line with other SEMI S standards (like SEMI S2, S22, ..) | Passed with editorial changes | |
Line Item 4 | Correct pointer to ISO 12100 in Appendix 1 | Passed with editorial changes | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5825 | SNARF | NA EHS Committee,
5-Year Review | Reapproval for SEMI E34-1110, Safety Guideline for Mass Flow Device Removal and Shipment
View SNARF # 5825 |
| 5827 | SNARF | NA EHS Committee,
5-Year Review | Reapproval for SEMI S5-0310, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
View SNARF # 5827 |
| 5826 | SNARF | NA EHS Committee,
5-Year Review | Reapproval for SEMI S27-0310, Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
View SNARF #5826 |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
| 4316L | Cycle 2, 2015 or earlier | S22 TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment |
| 4449E | Cycle 2, 2015 or earlier | S2 Ladders & Steps TF | Delayed Line Item Revision to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
Line Item Revisions related to Work at Elevated Locations and Design Criteria for Platforms, Steps, and Ladders |
| 4683E | Cycle 2, 2015 or earlier | S2 Chemical Exposure TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions related to Chemical Exposure |
| 5009D | Cycle 2, 2015 or earlier | S8 Ergonomics TF | Line Item Revisions to SEMI S8-0712, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment.
Delayed Revisions on Multiple Topics |
| 5625 | Cycle 2, 2015 or earlier | S2 Non-ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions related to non-ionizing radiation |
| 5718B | Cycle 2, 2015 or earlier | S10 TF | Line Item Revisions to SEMI S10-0307E, Safety Guideline for Risk Assessment and Risk Evaluation Process |
| 5825 | Cycle 8, 2014 | NA EHS Committee,
5-Year Review | Reapproval for SEMI E34-1110, Safety Guideline for Mass Flow Device Removal and Shipment |
| 5827 | Cycle 8, 2014 | NA EHS Committee,
5-Year Review | Reapproval for SEMI S5-0310, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves |
| 5826 | Cycle 8, 2014 | NA EHS Committee,
5-Year Review | Reapproval for SEMI S27-0310, Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
North America Standards Spring 2015 Meetings
March 30 – April 2, 2015
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
U.S.A.
Monday, March 30
- S22 (Electrical Safety) TF (9:00 AM to 10:30 AM)
- Review of SEMI E34, S5, and S27 Reapproval Ballots (10:30 AM to 12:00 Noon)
- EHS Process Meeting / Lunch Break (12:00 Noon to 1:00 PM)
- S2 Non-Ionizing Radiation TF (1:00 PM to 2:00 PM)
- S2 Chemical Exposure TF (2:00 PM to 3:30 PM)
- S6 Revision TF (3:30 PM to 5:00 PM)
Tuesday, March 31
- Fire Protection TF (9:00 AM to 10:00 AM)
- S10 TF (10:00 AM to 11:00 AM)
- NA Seismic Liaison TF (11:00 AM to 12:00 Noon)
- S7 Revision TF (1:00 PM to 2:00 PM)
- Energetic Materials EHS TF (2:00 PM to 3:30 PM)
- S8 Ergonomics TF (3:30 PM to 5:00 PM)
- S23 Revision Japan TF (5:00 PM to 6:00 PM)
Wednesday, April 1
- {International Compliance and Regulatory Committee [ICRC] (8:00 AM to 12:00 Noon)}
- EHS Leadership Meeting / Lunch Break (12:00 Noon to 1:00 PM)
- Hazardous Energy Control Isolation Devices TF (1:00 PM to 2:00 PM)
- Manufacturing Equipment Safety Subcommittee [MESSC] (2:00 PM to 4:00 PM)
- S2 Ladders & Steps TF (4:00 PM to 5:30 PM)
Thursday, April 2
- EHS Committee (9:00 AM to 6:00 PM)
For more information, please visit: http://www.semi.org/standards
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