SEMI International Standards
Standards Locale: North America
Committee: Silicon Wafer
Place of Meeting: KLA-Tencor, Milpitas, CA
Date of Meeting: 04/05/2016
Meeting End Date: 04/05/2016
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 04/11/2016


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
None.

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5993SNARFPolished Wafer Task ForceLine Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers
5994SNARFInt'l Automated Advance Surface Inspection Task ForceLine Item Revision to SEMI M50, Test Methods for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method (Fix title for conformance)
5995SNARFInt'l Automated Advance Surface Inspection Task ForceLine Item Revision of SEMI MF1048-1111 TEST METHOD FOR MEASURING REFLECTIVE TOTAL INTEGRATED SCATTER


Authorized Ballots

#
When
SC/TF/WG
Details
5989Cycle 4-16Int'l Epi Wafer Task ForceRevision of SEMI M62-0515, Specifications for Silicon Epitaxial Wafers
5990Cycle 4-16Int'l Automated Advance Surface Inspection Task ForceRevision of SEMI MF1811-0116, Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
5994Cycle 4-16Int'l Automated Advance Surface Inspection Task ForceLine Item Revision to SEMI M50, Test Methods for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method (Fix title for conformance)
5993Cycle 5-16Polished Wafer Task ForceLine Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers


SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
Tuesday, July 12 2016 at the San Francisco Marriott Marquis in San Francisco, California in conjunction with SEMICON West 2016. Check www.semi.org/en/standards for latest update