SEMI International Standards
Standards Locale: North America |
Committee: Silicon Wafer |
Place of Meeting: KLA-Tencor, Milpitas, CA |
Date of Meeting: 04/05/2016 |
Meeting End Date: 04/05/2016 |
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Recording SEMI Standards Staff: Kevin Nguyen |
CER Posted to Web: 04/11/2016 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
None.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5993 | SNARF | Polished Wafer Task Force | Line Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers |
5994 | SNARF | Int'l Automated Advance Surface Inspection Task Force | Line Item Revision to SEMI M50, Test Methods for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method (Fix title for conformance) |
5995 | SNARF | Int'l Automated Advance Surface Inspection Task Force | Line Item Revision of SEMI MF1048-1111 TEST METHOD FOR MEASURING REFLECTIVE TOTAL INTEGRATED SCATTER |
Authorized Ballots
# | When | SC/TF/WG | Details |
5989 | Cycle 4-16 | Int'l Epi Wafer Task Force | Revision of SEMI M62-0515, Specifications for Silicon Epitaxial Wafers |
5990 | Cycle 4-16 | Int'l Automated Advance Surface Inspection Task Force | Revision of SEMI MF1811-0116, Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data |
5994 | Cycle 4-16 | Int'l Automated Advance Surface Inspection Task Force | Line Item Revision to SEMI M50, Test Methods for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method (Fix title for conformance) |
5993 | Cycle 5-16 | Polished Wafer Task Force | Line Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Tuesday, July 12 2016 at the San Francisco Marriott Marquis in San Francisco, California in conjunction with SEMICON West 2016. Check www.semi.org/en/standards for latest update
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