SEMI International Standards
| Standards Locale: North America |
| Committee: Information & Control |
| Place of Meeting: SEMI Headquarters in San Jose, California |
| Date of Meeting: 10/30/2013 |
| Meeting End Date: 10/30/2013 |
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| Recording SEMI Standards Staff: Paul Trio |
| CER Posted to Web: 11/07/2013 |
Leadership Changes
Group | Previous Leader | New Leader |
| AMHS IBSEM Task Force was disbanded. | Kevin Dandoy (Applied Materials) and Ron Denison (Consultant) | |
Sort Map Task Force was disbanded.
Note: The TF would be re-chartered when its standardization efforts become active. | Thierry deVilleneuve (STMicroelectronics) and Dave Huntley (Kinesys Software) | |
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
5454C | Line Item Revision to SEMI E30-0611, Generic Model for Communications and Control of Manufacturing Equipment (GEM) and SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II) | |  |
Line Item 1 | Modifications to the definition of alarms and alarm categories | Failed, to be reballoted | |
5507 | Line Item Revisions to:
- SEMI E120-0310, Specification for the Common Equipment Model (CEM),
- SEMI E120.1-0310, XML Schema for the Common Equipment Model (CEM),
- SEMI E125-0710, Specification for Equipment Self Description (EqSD),
- SEMI E125.1-0710, Specification for SOAP Binding for Equipment Self Description (EQSD),
- SEMI E128-0310, Specification for XML Message Structures,
- SEMI E132-0310E2, Specification for Equipment Client Authentication and Authorization
- SEMI E132.1-0310, Specification for SOAP Binding for Equipment Client Authentication and Authorization (ECA),
- SEMI E134-0813, Specification for Data Collection Management
- SEMI E134.1-0813, Specification for SOAP Binding of Data Collection Management (DCM),
- SEMI E138-0709, XML Semiconductor Common Components
- SEMI E145-0213, Classification for Measurement Unit Symbols in XML
- SEMI E164-0313, Specification for EDA Common Metadata | |  |
Line Item 1 | Complementary Files and Various Materials | Passed as balloted | |
Line Item 2 | E132 Issues | Failed, to be reballoted | |
Line Item 3 | E128 Issues | Passed with editorial changes | |
Line Item 4 | E120 Issues | Passed as balloted | |
Line Item 5 | E125 Issues | Passed as balloted | |
Line Item 6 | E134 Issue | Passed as balloted | |
Line Item 7 | E132 Client SessionPing | Passed as balloted | |
Line Item 8 | E138 Issue | Passed as balloted | |
5509B | Line Item Revision to SEMI E94-0713, Specification for Control Job Management | |  |
Line Item 1 | Clarify the entry for OutputRule in Table 2 | Passed as balloted. Superclean | |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
Listing of all new TFOFs, SNARFs, and other activities approved by the committee.
# | Type | SC/TF/WG | Details |
5589 | Revised SNARF | GEM300 TF | Revisions to:
- SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM);
- SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM);
- SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM);
- SEMI E88, Specification for AMHS Storage SEM (Stocker SEM);
- SEMI E91, Specification for Prober Specific Equipment Model (PSEM);
- SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM); and
- SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)
Remove references and content related to SML and SML Notation.
Updated to include additional Standards to be revised.
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E87.1, Provisional Specification for SECS-II Protocol for Carrier Management (CMS);
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS);
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);
- SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM);
- SEMI E123, Standard for Handler Equipment Specific Equipment Model (HSEM);
- SEMI E138, XML Semiconductor Common Components; and
- SEMI E153, Specification for AMHS SEM (AMHS SEM)
Revisions/updates were also made to other SNARF sections including Rationale, Scope, and General Milestones. |
5618 | Revised SNARF | GEM300 TF | New Standard: Specification for Preservation of Recipe Integrity
Revisions/updates made to the SNARF Scope and Copyright sections. |
5619 | Revised SNARF | GEM300 TF | Revision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) and New Complimentary File: SECS-II Equipment Data Template
Revisions/updates made to the SNARF include submitter information, Rationale, Scope, General Milestones, and Copyright sections. |
5620 | Revised SNARF | GEM300 TF | Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) and New Complementary File: SECS-II Message Notation using XML
Changed to reflect revisions will be made to SEMI E5 instead of E30 (including the Scope section). |
5677 | SNARF | Diagnostic Data Acquisition (DDA) TF | Revision to SEMI E164, Specification for EDA Common Metadata |
5678 | SNARF | NA I&C Committee | Reapproval for SEMI E39, Object Services Standard: Concepts, Behavior, and Services |
5679 | SNARF | NA I&C Committee | Reapproval for SEMI E91, Specification for Prober Specific Equipment Model (PSEM) |
5680 | SNARF | NA I&C Committee | Reapproval for SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock Object |
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents approved by the committee for letter ballot.
# | When | SC/TF/WG | Details |
| 5274B | Cycle 8, 2013 | Sensor Bus TF | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54, Sensor/Actuator Network Standard |
| 5650 | Cycle 8, 2013 | Process Control Systems (PCS) TF | Line Item Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS) |
| 5678 | Cycle 1, 2014 | NA I&C Committee | Reapproval for SEMI E39, Object Services Standard: Concepts, Behavior, and Services |
| 5679 | Cycle 1, 2014 | NA I&C Committee | Reapproval for SEMI E91, Specification for Prober Specific Equipment Model (PSEM) |
| 5680 | Cycle 1, 2014 | NA I&C Committee | Reapproval for SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock Object |
| 4507A | Cycle 2, 2014 | PCS TF | Revision to SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS). For fault detection enhancements |
| 5454D | Cycle 2, 2014 | GEM300 TF | Line Item Revisions to SEMI E30, Generic Equipment Model (GEM) Standard and SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
| 5507A | Cycle 2, 2014 | Diagnostic Data Acquisition (DDA) TF | Line Item Revisions to:
- SEMI E120-0310, Specification for the Common Equipment Model (CEM);
- SEMI E120.1-0310, XML Schema for the Common Equipment Model (CEM);
- SEMI E125-0710, Specification for Equipment Self Description (EqSD);
- SEMI E125.1-0710, Specification for SOAP Binding for Equipment Self Description (EQSD);
- SEMI E128-0310, Specification for XML Message Structures;
- SEMI E132-0310E2, Specification for Equipment Client Authentication and Authorization;
- SEMI E132.1-0310, Specification for SOAP Binding for Equipment Client Authentication and Authorization (ECA);
- SEMI E134-0813, Specification for Data Collection Management;
- SEMI E134.1-0813, Specification for SOAP Binding of Data Collection Management (DCM);
- SEMI E138-0709, XML Semiconductor Common Components;
- SEMI E145-0213, Classification for Measurement Unit Symbols in XML; and
- SEMI E164-0313, Specification for EDA Common Metadata; |
| 5508 | Cycle 2, 2014 | GEM300 TF | Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E90, Specification for Substrate Tracking; and
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking |
| 5589A | Cycle 2, 2014 | GEM300 TF | Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM);
- SEMI E30.1, Inspection and Review Specific Equipment Model (ISEM);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E82, Specification for Interbay/Intrabay AMHS SEM (IBSEM);
- SEMI E87.1, Provisional Specification for SECS-II Protocol for Carrier Management (CMS);
- SEMI E88, Specification for AMHS Storage SEM (Stocker SEM);
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E91, Specification for Prober Specific Equipment Model (PSEM);
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS);
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);
- SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM);
- SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM);
- SEMI E123, Standard for Handler Equipment Specific Equipment Model (HSEM);
- SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM);
- SEMI E138, XML Semiconductor Common Components; and
- SEMI E153, Specification for AMHS SEM (AMHS SEM) |
| 5618 | Cycle 2, 2014 | GEM300 TF | New Standard: Specification for Preservation of Recipe Integrity |
| 5619 | Cycle 2, 2014 | GEM300 TF | Revision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) and New Complimentary File: SECS-II Equipment Data Template |
| 5620 | Cycle 2, 2014 | GEM300 TF | Revision to SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II) and New Complementary File: SECS-II Message Notation using XML |
| 5677 | Cycle 2, 2014 | Diagnostic Data Acquisition (DDA) TF | Revision to SEMI E164, Specification for EDA Common Metadata |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
SECS Message Language (SML) Copyright
At the North America (NA) Standards Fall 2013 Meetings, the NA I&C Committee agreed to establish a working group that would prepare a report to facilitate the TC Chapter examining the issue according to the SEMI Standards Regulations § 15.4
- Suggest areas of potential reproduction
- Examine the question of technical justification
Next Meeting
North America Standards Spring 2014 Meetings
March 31 – April 3, 2014
SEMI Headquarters
3081 Zanker Road
San Jose, California 94103
Monday, March 31
- I&C Leadership (12:00 Noon – 1:00 PM)
- PCS (1:00 PM – 3:00 PM)
- DDA (1:00 PM – 4:00 PM)
- SML Copyright Review WG (4:00 PM to 6:00 PM)
Tuesday, April 1
- GEM300 (8:00 AM – 5:00 PM)
- Energy Saving Equipment Communication (9:00 AM – 12:00 Noon)
- Sensor Bus (1:00 PM – 3:00 PM)
- I&C GCS (5:00 PM to 6:00 PM)
Wednesday, April 2
- I&C Committee (8:00 AM – 4:30 PM)
For more information about the NA Standards Spring 2014 meetings, please visit: http://www.semi.org/node/47781
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