SEMI International Standards
Standards Locale: North America
Committee: Information & Control
Place of Meeting: SEMI Headquarters in San Jose, California
Date of Meeting: 11/05/2014
Meeting End Date: 11/05/2014
Recording SEMI Standards Staff: Paul Trio
CER Posted to Web: 11/20/2014


Leadership Changes
None.

Committee Structure Changes
None.

Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
Cycle 6, 2014 Ballots
5274C
Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network StandardFailed, to be reballoted5274CBallotReview FAILED.docx5274CBallotReview FAILED.docx
5508
Line Revisions to SEMI E90-0312, Specification for Substrate Tracking; SEMI E90.1-0312, Specification for SECS-II Protocol Substrate Tracking; and SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Add Batch Object SEMI E90 & E90.1 and a New Material Format in SEMI E55508BallotReview FAILED.docx5508BallotReview FAILED.docx
Line Item 1
New Material Format to Allow BatchesFailed, to be reworked
Line Item 2
New Batch Object and Batch State ModelFailed, to be discontinued
5618
New Standard: Specification for Preservation of Recipe Integrity (PRI)Failed, to be reballoted5618BallotReview FAILED.docx5618BallotReview FAILED.docx
5619A
New Standard: Specification for SECS Equipment Data Dictionary (SEDD)Passed as balloted5619AProceduralReview.docx5619AProceduralReview.docx
5620A
New Standard: Specification for SECS-II Message Notation (SMN)Passed with editorial changes5620AProceduralReview.docx5620AProceduralReview.docx


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities

#
Type
SC/TF/WG
Details
5762
Revised SNARFDiagnostic Data Acquisition (DDA)TFRevision to SEMI E132.1, Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA). Adding EDA freeze versions to E132.1
SNARF revised from E132 revision (Specification for Equipment Client Authentication and Authorization) to E132.1 revision.
TBA
SNARFGEM300 TFRevision to Specification for SECS Equipment Data Dictionary (SEDD) [formerly SEMI Draft Document 5619A]
SEMI Draft Document 5619A (New Standard: Specification for SECS Equipment Data Dictionary {SEDD}) passed technical committee review on November 5, 2014. Pending successful procedural review, Document 5619A will be published as a SEMI Standard. This SNARF proposes additional refinements to the SEDD Standard.
TBA = to be assigned
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots

#
When
SC/TF/WG
Details
5274DCycle 1 or Cycle 2, 2015Sensor Bus TFRevision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard
5618ACycle 1 or Cycle 2, 2015GEM300 TFNew Standard: Specification for Preservation of Recipe Integrity (PRI)
5677Cycle 2, 2015Diagnostic Data Acquisition (DDA) TFRevision to SEMI E164, Specification for EDA Common Metadata
5716Cycle 2, 2015Process Control System (PCS) TFRevisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS)
5762Cycle 2, 2015Diagnostic Data Acquisition (DDA)TFRevision to SEMI E132.1, Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA). Adding EDA freeze versions to E132.1
TBACycle 2, 2015Energy Saving Equipment Communication (ESEC) TFNew Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems
SNARF approved via I&C GCS
TBACycle 2, 2015GEM300 TFRevision to Specification for SECS Equipment Data Dictionary (SEDD) [formerly SEMI Draft Document 5619A]
SEMI Draft Document 5619A (New Standard: Specification for SECS Equipment Data Dictionary {SEDD}) passed technical committee review on November 5, 2014. Pending successful procedural review and publication, this ballot will propose additional refinements to the SEDD Standard.
TBA = to be assigned

SNARF(s) Granted a One-Year Extension
None.

SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
North America Standards Spring 2015 Meetings
March 30 – April 2, 2015
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
U.S.A.

Monday, March 30
- Japan Predictive Carrier Logistics TF (11:00 AM to 12:00 Noon, US Pacific Time)
- I&C Leadership (12:00 Noon to 1:00 PM)
- Diagnostic Data Acquisition (DDA) TF (1:00 PM to 3:00 PM)

Tuesday, March 31
- Energy Saving Equipment Communication TF (8:00 AM to 10:00 AM)
- GEM300 TF (10:00 AM to 5:00 PM)
- Sensor Bus TF (1:00 PM to 3:00 PM)
- Process Control System (PCS) TF (3:00 PM to 5:00 PM)
- I&C GCS (5:00 PM to 6:00 PM)

Wednesday, April 1
- I&C Committee (8:00 AM to 4:30 PM)

For more information, please visit: http://www.semi.org/standards

Next Meeting
None.