SEMI International Standards
Standards Locale: North America |
Committee: Information & Control |
Place of Meeting: SEMI Headquarters in San Jose, California |
Date of Meeting: 11/05/2014 |
Meeting End Date: 11/05/2014 |
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Recording SEMI Standards Staff: Paul Trio |
CER Posted to Web: 11/20/2014 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Failed ballots and line items were returned to the originating task forces for re-work and re-balloting.
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 6, 2014 Ballots | | |
5274C | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard | Failed, to be reballoted | 5274CBallotReview FAILED.docx |
5508 | Line Revisions to SEMI E90-0312, Specification for Substrate Tracking; SEMI E90.1-0312, Specification for SECS-II Protocol Substrate Tracking; and SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Add Batch Object SEMI E90 & E90.1 and a New Material Format in SEMI E5 | | 5508BallotReview FAILED.docx |
Line Item 1 | New Material Format to Allow Batches | Failed, to be reworked | |
Line Item 2 | New Batch Object and Batch State Model | Failed, to be discontinued | |
5618 | New Standard: Specification for Preservation of Recipe Integrity (PRI) | Failed, to be reballoted | 5618BallotReview FAILED.docx |
5619A | New Standard: Specification for SECS Equipment Data Dictionary (SEDD) | Passed as balloted | 5619AProceduralReview.docx |
5620A | New Standard: Specification for SECS-II Message Notation (SMN) | Passed with editorial changes | 5620AProceduralReview.docx |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
5762 | Revised SNARF | Diagnostic Data Acquisition (DDA)TF | Revision to SEMI E132.1, Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA). Adding EDA freeze versions to E132.1
SNARF revised from E132 revision (Specification for Equipment Client Authentication and Authorization) to E132.1 revision. |
TBA | SNARF | GEM300 TF | Revision to Specification for SECS Equipment Data Dictionary (SEDD) [formerly SEMI Draft Document 5619A]
SEMI Draft Document 5619A (New Standard: Specification for SECS Equipment Data Dictionary {SEDD}) passed technical committee review on November 5, 2014. Pending successful procedural review, Document 5619A will be published as a SEMI Standard. This SNARF proposes additional refinements to the SEDD Standard. |
TBA = to be assigned
Note: SNARFs and TFOFs are available for review on the SEMI Web site at:
http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
# | When | SC/TF/WG | Details |
5274D | Cycle 1 or Cycle 2, 2015 | Sensor Bus TF | Revision to Add a New Subordinate Standard Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Add-On Sensor (ADDON) to SEMI E54-0413, Sensor/Actuator Network Standard |
5618A | Cycle 1 or Cycle 2, 2015 | GEM300 TF | New Standard: Specification for Preservation of Recipe Integrity (PRI) |
5677 | Cycle 2, 2015 | Diagnostic Data Acquisition (DDA) TF | Revision to SEMI E164, Specification for EDA Common Metadata |
5716 | Cycle 2, 2015 | Process Control System (PCS) TF | Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS) |
5762 | Cycle 2, 2015 | Diagnostic Data Acquisition (DDA)TF | Revision to SEMI E132.1, Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA). Adding EDA freeze versions to E132.1 |
TBA | Cycle 2, 2015 | Energy Saving Equipment Communication (ESEC) TF | New Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems
SNARF approved via I&C GCS |
TBA | Cycle 2, 2015 | GEM300 TF | Revision to Specification for SECS Equipment Data Dictionary (SEDD) [formerly SEMI Draft Document 5619A]
SEMI Draft Document 5619A (New Standard: Specification for SECS Equipment Data Dictionary {SEDD}) passed technical committee review on November 5, 2014. Pending successful procedural review and publication, this ballot will propose additional refinements to the SEDD Standard. |
TBA = to be assigned
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
North America Standards Spring 2015 Meetings
March 30 – April 2, 2015
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134
U.S.A.
Monday, March 30
- Japan Predictive Carrier Logistics TF (11:00 AM to 12:00 Noon, US Pacific Time)
- I&C Leadership (12:00 Noon to 1:00 PM)
- Diagnostic Data Acquisition (DDA) TF (1:00 PM to 3:00 PM)
Tuesday, March 31
- Energy Saving Equipment Communication TF (8:00 AM to 10:00 AM)
- GEM300 TF (10:00 AM to 5:00 PM)
- Sensor Bus TF (1:00 PM to 3:00 PM)
- Process Control System (PCS) TF (3:00 PM to 5:00 PM)
- I&C GCS (5:00 PM to 6:00 PM)
Wednesday, April 1
- I&C Committee (8:00 AM to 4:30 PM)
For more information, please visit: http://www.semi.org/standards
Next Meeting
None.
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