SEMI International Standards
| Standards Locale: North America |
| Committee: Liquid Chemicals |
| Place of Meeting: SEMI HQ, Milpitas, CA |
| Date of Meeting: 11/07/2017 |
| Meeting End Date: 11/07/2017 |
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| Recording SEMI Standards Staff: Inna Skvortsova |
| CER Posted to Web: 11/16/2017 |
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
6254 |
Reapproval of SEMI C62-0309, Specification for Porogen Precursors Used in Low K CVD Processes | Passed |  6254 Procedural Review.pdf |
6255 |
Reapproval of SEMI C63-1108, Specification for Organosilicate Precursors Used in Low K CVD Processes | Passed |  6255 Procedural Review.pdf |
6190 |
Line-item Revision to SEMI C45-0309E, Specification and Guideline for Tetraethylorthosilicate (TEOS), to correct nonconforming title | Passed |  6190 Procedural Review.pdf |
6250 |
Line-item Revision to SEMI C29-1110, Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) to correct nonconforming title | Passed |  6250 Procedural Review.pdf |
6253 |
Reapproval of SEMI C40-1110, Specification for Potassium Hydroxide, 45% Solution | Passed |  6253 Procedural Review.pdf |
6252 |
Reapproval of SEMI C1-0310, Guide for the Analysis of Liquid Chemicals | Passed |  6252 Procedural Review.pdf |
6257 | Reinstatement of SEMI F34-0998, Guide for Liquid Chemical Pipe Labeling | Passed |  6257 Procedural Review.pdf |
5942 | Revision to SEMI E49.4-0298, with title change to, Guide for Ultrahigh Purity Solvent Distribution Systems with Metallic Fluid Paths in Semiconductor Manufacturing Equipment | Passed |  5942 Procedural Review.pdf |
5978 |
Revision to SEMI E49.5-1104, with title change to, Guide for the Design of Ultrahigh Purity Solvent Distribution Systems with Non-Metallic Fluid Paths in Semiconductor Manufacturing Equipment | Passed |  5978 Procedural Review.pdf |
6258 |
Revision to SEMI E49.7-0304E, with title change to: Guide for the Design and Manufacture of Polymer Assemblies Used for Liquid Chemical Systems in Semiconductor Equipment | Passed |  6258 Procedural Review.pdf |
6136 |
Revision to SEMI F98-0305 (Reapproved 1111), with title change to: Guide for Water Reuse in Semiconductor Industry | Passed |  6136 Procedural Review.pdf |
6259 |
Revision to SEMI C21-0708 with title change to: Specification and Guide For Ammonium Hydroxide | Passed |  6259 Procedural Review.pdf |
6260 |
Revision to SEMI C28-0611 with title change to: Specification and Guide for Hydrofluoric Acid | Passed |  6260 Procedural Review.pdf |
6261 |
Revision to SEMI C41-0705 with title change to: Specification and Guide For 2-Propanol | Passed |  6261 Procedural Review.pdf |
6262 |
Revision to SEMI C44-0514, Specification And Guide For Sulfuric Acid | Passed |  6262 Procedural Review.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
6258 | SNARF | HPLA&S TF | Revision to SEMI E49.7-0304, Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment, with title change
Approved and authorized for Cycle 7-17 ballot submission by GCS 08/16/2017 |
6259 | SNARF | CAM TF | Revision to SEMI C21-0708, Specifications and Guidelines for Ammonium Hydroxide, including title change to Specification and Guide for Ammonium Hydroxide
Approved and authorized for Cycle 7-17 ballot submission by GCS 08/16/2017 |
6260 | SNARF | CAM TF | Revision to SEMI C28-0611, Specifications for Hydrofluoric Acid, with title change to correct nonconforming title
Approved and authorized for Cycle 7-17 ballot submission by GCS 08/16/2017 |
6261 | SNARF | CAM TF | Revision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol including title change to Specification and Guide for 2-Propanol
Approved and authorized for Cycle 7-17 ballot submission by GCS 08/16/2017 |
6262 | SNARF | CAM TF | Revision to SEMI C44-0514, Specification and Guide for Sulfuric Acid
Approved and authorized for Cycle 7-17 ballot submission by GCS 08/16/2017 |
Authorized Activities
# | Type | SC/TF/WG | Details |
| TBD | SNARF | UPW TF | Revision of SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing
New SNARF, for 2 weeks review and GCS approval and ballot authorization in Cycle 2-2018 |
| TBD | SNARF | UPW TF | Revision of SEMI C79, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
New SNARF, for 2 weeks review and GCS approval and ballot authorization in Cycle 6-2018 |
| TBD | SNARF | HPPM&C | Reapproval to F40, Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
New SNARF approved by TC |
| TBD | SNARF | CAM TF | Line-item Revision of SEMI C27, Specification and Guide for Hydrochloric Acid
New SNARF approved by TC.
Ballot after SEMI publishes most recently adjudicated version of the document. |
| TBD | SNARF | CAM TF | Line-item Revision of SEMI C30, Specification and Guide for Hydrogen Peroxide
New SNARF approved by TC
Ballot after SEMI publishes most recently adjudicated version of the document. |
Authorized Ballots
# | When | TF | Details |
| TBD | Cycle 2-18 | HPPM&C TF | Reapproval to F40, Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing |
| 6085 | Cycle 2-18 | HPPM&C TF | Revision of SEMI F57-0314, Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems |
| 5991 | Cycle 1 or 2-18 | CAM TF | New Standard, Test Method for Determining Density of Chemical Mechanical Polish (CMP) Slurries |
| TBD | Cycle 2-18 | CAM TF | Line-item Revision of SEMI C27, Specification and Guide for Hydrochloric Acid
Ballot after SEMI publishes most recently adjudicated version of the document. |
| TBD | Cycle 2-18 | CAM TF | Line-item Revision of SEMI C30, Specification and Guide for Hydrogen Peroxide
Ballot after SEMI publishes most recently adjudicated version of the document. |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Next Meeting
Monday, April 9 2018; SEMI HQ, Milpitas CA
- Chemical Analytical Methods TF (1PM-2:30PM)
- High Purity Liquid Assemblies and Systems TF (2:30PM - 4PM)
Tuesday, April 10 2018; SEMI HQ, Milpitas CA
- UPW Task Force (8AM – 9:30AM)
- High Purity Polymer Materials & Components (9:30AM – 11AM)
- Liquid Chemicals TC Chapter (2PM - 5PM)
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